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- W2056376028 abstract "The gettering efficiency for Au induced by Ne+ implantation in the n- and p-type silicon has been studied. The experiment shows that for gettering temperature 900 degrees C and annealing time 30 minutes the maximum efficiency of gettering in both types of Si occurs at the Ne+ dose of 1016 ions cm-2." @default.
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- W2056376028 date "1988-08-01" @default.
- W2056376028 modified "2023-09-23" @default.
- W2056376028 title "The efficiency of gettering Au in n-type and p-type silicon" @default.
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- W2056376028 doi "https://doi.org/10.1088/0268-1242/3/8/014" @default.
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