Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056377597> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2056377597 abstract "Recently we reported on low refractive index fluorinated silica (SiOF) films obtained by a Molecular Ion Beam Assisted Deposition (MIBAD) process, using a fluorocarbon precursor in an End Hall ion source during evaporation of silica grains. These films were unstable due to moisture absorption and a subsequent chemical reaction, leading to an irreversible change in composition and increase of refractive index.In this paper we investigate an inert gas enhanced MIBAD process, involving the simultaneous use of a fluorocarbon precursor and an inert gas in the ion gun. Ion beam composition was analyzed by energy selective ion mass spectrometry. Addition of inert gas to the fluorocarbon precursor not only increases the total ion current, but also enhances the dissociation of the fluorocarbon precursor into smaller fragments.The films were characterized by ellipsometry, IR transmission spectroscopy and in situ and ex situ stress measurements.Time evolution of film properties was followed for several weeks. For a given fluorocarbon precursor flow rate, refractive index measured directly after deposition increases with increasing inert gas flow rate, while refractive index change with time is reduced. Fluorine content in the films is maximum for low inert gas flow rates, but decreases for higher flow rates to reach approximately the same level as for pure fluorocarbon ion beam. The observed refractive indexstabilization for high inert gas flow rates can be explained by a change in film structure rather than film composition, i.e.by reduced film porosity due to high inert gas ion bombardment.With carefully chosen deposition conditions, stable films with low refractive index can be obtained." @default.
- W2056377597 created "2016-06-24" @default.
- W2056377597 creator A5016758536 @default.
- W2056377597 creator A5031298639 @default.
- W2056377597 creator A5049757666 @default.
- W2056377597 creator A5052370251 @default.
- W2056377597 creator A5060775778 @default.
- W2056377597 creator A5064369703 @default.
- W2056377597 creator A5087250359 @default.
- W2056377597 date "2004-02-25" @default.
- W2056377597 modified "2023-09-27" @default.
- W2056377597 title "Molecular-ion-beam-assisted deposition of stable SiOF films" @default.
- W2056377597 cites W1965619711 @default.
- W2056377597 cites W1966830288 @default.
- W2056377597 cites W1969541916 @default.
- W2056377597 cites W1970991228 @default.
- W2056377597 cites W1982366804 @default.
- W2056377597 cites W2013568982 @default.
- W2056377597 cites W2017012011 @default.
- W2056377597 cites W2020140420 @default.
- W2056377597 cites W2026535758 @default.
- W2056377597 cites W2042838948 @default.
- W2056377597 cites W2044167968 @default.
- W2056377597 cites W2093772383 @default.
- W2056377597 cites W2156639697 @default.
- W2056377597 doi "https://doi.org/10.1117/12.516072" @default.
- W2056377597 hasPublicationYear "2004" @default.
- W2056377597 type Work @default.
- W2056377597 sameAs 2056377597 @default.
- W2056377597 citedByCount "0" @default.
- W2056377597 crossrefType "proceedings-article" @default.
- W2056377597 hasAuthorship W2056377597A5016758536 @default.
- W2056377597 hasAuthorship W2056377597A5031298639 @default.
- W2056377597 hasAuthorship W2056377597A5049757666 @default.
- W2056377597 hasAuthorship W2056377597A5052370251 @default.
- W2056377597 hasAuthorship W2056377597A5060775778 @default.
- W2056377597 hasAuthorship W2056377597A5064369703 @default.
- W2056377597 hasAuthorship W2056377597A5087250359 @default.
- W2056377597 hasConcept C120665830 @default.
- W2056377597 hasConcept C121332964 @default.
- W2056377597 hasConcept C127313418 @default.
- W2056377597 hasConcept C145148216 @default.
- W2056377597 hasConcept C151730666 @default.
- W2056377597 hasConcept C168834538 @default.
- W2056377597 hasConcept C192562407 @default.
- W2056377597 hasConcept C2781463530 @default.
- W2056377597 hasConcept C2816523 @default.
- W2056377597 hasConcept C41008148 @default.
- W2056377597 hasConcept C49040817 @default.
- W2056377597 hasConcept C50774322 @default.
- W2056377597 hasConcept C62520636 @default.
- W2056377597 hasConcept C64297162 @default.
- W2056377597 hasConcept C93106096 @default.
- W2056377597 hasConceptScore W2056377597C120665830 @default.
- W2056377597 hasConceptScore W2056377597C121332964 @default.
- W2056377597 hasConceptScore W2056377597C127313418 @default.
- W2056377597 hasConceptScore W2056377597C145148216 @default.
- W2056377597 hasConceptScore W2056377597C151730666 @default.
- W2056377597 hasConceptScore W2056377597C168834538 @default.
- W2056377597 hasConceptScore W2056377597C192562407 @default.
- W2056377597 hasConceptScore W2056377597C2781463530 @default.
- W2056377597 hasConceptScore W2056377597C2816523 @default.
- W2056377597 hasConceptScore W2056377597C41008148 @default.
- W2056377597 hasConceptScore W2056377597C49040817 @default.
- W2056377597 hasConceptScore W2056377597C50774322 @default.
- W2056377597 hasConceptScore W2056377597C62520636 @default.
- W2056377597 hasConceptScore W2056377597C64297162 @default.
- W2056377597 hasConceptScore W2056377597C93106096 @default.
- W2056377597 hasLocation W20563775971 @default.
- W2056377597 hasLocation W20563775972 @default.
- W2056377597 hasLocation W20563775973 @default.
- W2056377597 hasOpenAccess W2056377597 @default.
- W2056377597 hasPrimaryLocation W20563775971 @default.
- W2056377597 hasRelatedWork W1869419424 @default.
- W2056377597 hasRelatedWork W1978021736 @default.
- W2056377597 hasRelatedWork W2015795944 @default.
- W2056377597 hasRelatedWork W2036380413 @default.
- W2056377597 hasRelatedWork W203961977 @default.
- W2056377597 hasRelatedWork W2058269927 @default.
- W2056377597 hasRelatedWork W2148430058 @default.
- W2056377597 hasRelatedWork W2325131937 @default.
- W2056377597 hasRelatedWork W2331503864 @default.
- W2056377597 hasRelatedWork W2354806440 @default.
- W2056377597 isParatext "false" @default.
- W2056377597 isRetracted "false" @default.
- W2056377597 magId "2056377597" @default.
- W2056377597 workType "article" @default.