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• W2056481572 abstract "In this study we investigate how the sputtering of zinc from a zinc target is influenced by the properties of O2/Ar plasma when the discharge parameters such as gas pressure ratio and target bias voltage are changed. We also investigate plasma conditions for the formation of ZnO nanowires that are created and deposited on the substrate. We found that a plasma condition with strong optical emission from Zn neutrals is an important factor for the deposition of ZnO nanowires. Both the growth of nanowires and the emission intensity from Zn strongly depend on the partial pressure of oxygen." @default.
• W2056481572 created "2016-06-24" @default.
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• W2056481572 date "2009-12-01" @default.
• W2056481572 modified "2023-09-24" @default.
• W2056481572 title "Growth of ZnO nanowires in hollow-type magnetron O2/Ar RF plasma" @default.
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• W2056481572 doi "https://doi.org/10.1016/j.tsf.2009.07.176" @default.
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