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- W2056500792 abstract "In this paper we report on the development of diffractive and refractive micro optical components devoted to MidIR applications. As a material we use a customized heavy metal oxide glasses with high transmission in the range 0.6÷6.0μm. Optimization of the glass composition in four- and five-component oxide systems for a broadband transmission window is difficult due to their excessive crystallization susceptibility. Several metals and alloys were tested for their suitability as a stamping medium. Optimal performance was obtained for selected brass and steel stamps, as well as for pure silica stamps. As a technology testboard we have developed 1D and 2D diffractive gratings with a minimum feature size of 5μm as well as Fresnel microlenses with a diameter of 200μm. The quality of the embossed elements was verified by comparison of the master and replicated elements using a non-contact white light interferometer." @default.
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- W2056500792 date "2012-06-01" @default.
- W2056500792 modified "2023-10-12" @default.
- W2056500792 title "Development of glass microoptics for MidIR with hot embossing technology" @default.
- W2056500792 doi "https://doi.org/10.1117/12.922711" @default.
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