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- W2056500845 abstract "A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 µm is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging." @default.
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- W2056500845 date "2000-10-15" @default.
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- W2056500845 title "Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding" @default.
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- W2056500845 doi "https://doi.org/10.1364/ol.25.001505" @default.
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