Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056518868> ?p ?o ?g. }
- W2056518868 endingPage "728" @default.
- W2056518868 startingPage "724" @default.
- W2056518868 abstract "Abstract Silicon (1 0 0) wafers have been implanted with 1×10 15 He + or Ar + ions/cm 2 and the vacancy (V)–He or –Ar complexes induced have been investigated with positron lifetime and coincidence Doppler broadening measurements using a positron beam. He + ion implantation into Si gives rise to formation of V 2 He complexes, which are transformed into V x He y ( x – y =1) complexes by annealing at 300°C. The amorphous phase induced by Ar irradiation of Si is transformed into a crystalline phase around 700°C. The crystallization accompanies formation of V–Ar complexes with six vacant sites, and these complexes are found to be stable above 800°C. These results have proved that positrons are very useful probes to study the chemical state of vacancy-inert gas atoms complexes." @default.
- W2056518868 created "2016-06-24" @default.
- W2056518868 creator A5013573921 @default.
- W2056518868 creator A5016021126 @default.
- W2056518868 creator A5016810174 @default.
- W2056518868 creator A5023807824 @default.
- W2056518868 creator A5067983066 @default.
- W2056518868 creator A5084693356 @default.
- W2056518868 date "2003-12-01" @default.
- W2056518868 modified "2023-10-01" @default.
- W2056518868 title "A positron beam study of vacancy–impurity complexes in inert gas ion-implanted silicon" @default.
- W2056518868 cites W1625606078 @default.
- W2056518868 cites W2001483782 @default.
- W2056518868 cites W2002444592 @default.
- W2056518868 cites W2025033077 @default.
- W2056518868 cites W2041145557 @default.
- W2056518868 cites W2060190375 @default.
- W2056518868 cites W2061658843 @default.
- W2056518868 cites W2062924471 @default.
- W2056518868 cites W2070572983 @default.
- W2056518868 cites W2077637676 @default.
- W2056518868 cites W2093950013 @default.
- W2056518868 cites W2115719017 @default.
- W2056518868 cites W2157664098 @default.
- W2056518868 doi "https://doi.org/10.1016/j.physb.2003.09.153" @default.
- W2056518868 hasPublicationYear "2003" @default.
- W2056518868 type Work @default.
- W2056518868 sameAs 2056518868 @default.
- W2056518868 citedByCount "6" @default.
- W2056518868 countsByYear W20565188682012 @default.
- W2056518868 countsByYear W20565188682014 @default.
- W2056518868 countsByYear W20565188682023 @default.
- W2056518868 crossrefType "journal-article" @default.
- W2056518868 hasAuthorship W2056518868A5013573921 @default.
- W2056518868 hasAuthorship W2056518868A5016021126 @default.
- W2056518868 hasAuthorship W2056518868A5016810174 @default.
- W2056518868 hasAuthorship W2056518868A5023807824 @default.
- W2056518868 hasAuthorship W2056518868A5067983066 @default.
- W2056518868 hasAuthorship W2056518868A5084693356 @default.
- W2056518868 hasConcept C114221277 @default.
- W2056518868 hasConcept C120665830 @default.
- W2056518868 hasConcept C121332964 @default.
- W2056518868 hasConcept C145148216 @default.
- W2056518868 hasConcept C147120987 @default.
- W2056518868 hasConcept C154256306 @default.
- W2056518868 hasConcept C159985019 @default.
- W2056518868 hasConcept C168834538 @default.
- W2056518868 hasConcept C177322064 @default.
- W2056518868 hasConcept C178790620 @default.
- W2056518868 hasConcept C184779094 @default.
- W2056518868 hasConcept C185544564 @default.
- W2056518868 hasConcept C185592680 @default.
- W2056518868 hasConcept C192562407 @default.
- W2056518868 hasConcept C202100949 @default.
- W2056518868 hasConcept C49040817 @default.
- W2056518868 hasConcept C50774322 @default.
- W2056518868 hasConcept C544956773 @default.
- W2056518868 hasConcept C55766333 @default.
- W2056518868 hasConcept C71987851 @default.
- W2056518868 hasConcept C8010536 @default.
- W2056518868 hasConcept C93106096 @default.
- W2056518868 hasConceptScore W2056518868C114221277 @default.
- W2056518868 hasConceptScore W2056518868C120665830 @default.
- W2056518868 hasConceptScore W2056518868C121332964 @default.
- W2056518868 hasConceptScore W2056518868C145148216 @default.
- W2056518868 hasConceptScore W2056518868C147120987 @default.
- W2056518868 hasConceptScore W2056518868C154256306 @default.
- W2056518868 hasConceptScore W2056518868C159985019 @default.
- W2056518868 hasConceptScore W2056518868C168834538 @default.
- W2056518868 hasConceptScore W2056518868C177322064 @default.
- W2056518868 hasConceptScore W2056518868C178790620 @default.
- W2056518868 hasConceptScore W2056518868C184779094 @default.
- W2056518868 hasConceptScore W2056518868C185544564 @default.
- W2056518868 hasConceptScore W2056518868C185592680 @default.
- W2056518868 hasConceptScore W2056518868C192562407 @default.
- W2056518868 hasConceptScore W2056518868C202100949 @default.
- W2056518868 hasConceptScore W2056518868C49040817 @default.
- W2056518868 hasConceptScore W2056518868C50774322 @default.
- W2056518868 hasConceptScore W2056518868C544956773 @default.
- W2056518868 hasConceptScore W2056518868C55766333 @default.
- W2056518868 hasConceptScore W2056518868C71987851 @default.
- W2056518868 hasConceptScore W2056518868C8010536 @default.
- W2056518868 hasConceptScore W2056518868C93106096 @default.
- W2056518868 hasLocation W20565188681 @default.
- W2056518868 hasOpenAccess W2056518868 @default.
- W2056518868 hasPrimaryLocation W20565188681 @default.
- W2056518868 hasRelatedWork W1495609493 @default.
- W2056518868 hasRelatedWork W1967197938 @default.
- W2056518868 hasRelatedWork W1970225414 @default.
- W2056518868 hasRelatedWork W2055214643 @default.
- W2056518868 hasRelatedWork W2056518868 @default.
- W2056518868 hasRelatedWork W2058924817 @default.
- W2056518868 hasRelatedWork W2080810030 @default.
- W2056518868 hasRelatedWork W2084616009 @default.
- W2056518868 hasRelatedWork W4242004776 @default.
- W2056518868 hasRelatedWork W1981058176 @default.
- W2056518868 hasVolume "340-342" @default.
- W2056518868 isParatext "false" @default.