Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056535037> ?p ?o ?g. }
- W2056535037 endingPage "317" @default.
- W2056535037 startingPage "312" @default.
- W2056535037 abstract "The hydrogen content in diamond like carbon (DLC) thin films has been determined by elastic recoil detection analysis (ERDA) using a 2.7 MeV He2+ beam. The DLC films were prepared by an electron cyclotron resonance (ECR) microwave plasma chemical vapor deposition (CVD) system. Analysis of the spectra obtained reveals a uniform 29% concentration of hydrogen in the sub-surface region. Increasing the substrate temperature from room temperature to 250°C resulted in a decrease to 23% of the hydrogen concentration, accompanied by a 2.4 times increase of the film's Knoop hardness. This clearly demonstrates the usefulness of the hydrogen concentration measurement in monitoring changes in the film properties. We also discuss other factors during deposition such as bias voltage, microwave power, etc., which influences the hydrogen contents in the DLC film." @default.
- W2056535037 created "2016-06-24" @default.
- W2056535037 creator A5001456824 @default.
- W2056535037 creator A5022487006 @default.
- W2056535037 creator A5036589972 @default.
- W2056535037 creator A5080139660 @default.
- W2056535037 creator A5080853401 @default.
- W2056535037 creator A5085407857 @default.
- W2056535037 date "1996-09-01" @default.
- W2056535037 modified "2023-10-16" @default.
- W2056535037 title "Measurement of hydrogen content in diamond like carbon thin films by ERDA" @default.
- W2056535037 cites W1971187946 @default.
- W2056535037 cites W1979439219 @default.
- W2056535037 cites W2019346943 @default.
- W2056535037 cites W2052922991 @default.
- W2056535037 cites W2055165085 @default.
- W2056535037 cites W2059258525 @default.
- W2056535037 cites W2087455377 @default.
- W2056535037 cites W2110156327 @default.
- W2056535037 doi "https://doi.org/10.1016/0168-583x(95)01098-x" @default.
- W2056535037 hasPublicationYear "1996" @default.
- W2056535037 type Work @default.
- W2056535037 sameAs 2056535037 @default.
- W2056535037 citedByCount "30" @default.
- W2056535037 countsByYear W20565350372012 @default.
- W2056535037 countsByYear W20565350372013 @default.
- W2056535037 countsByYear W20565350372014 @default.
- W2056535037 countsByYear W20565350372016 @default.
- W2056535037 countsByYear W20565350372017 @default.
- W2056535037 countsByYear W20565350372019 @default.
- W2056535037 countsByYear W20565350372020 @default.
- W2056535037 countsByYear W20565350372021 @default.
- W2056535037 crossrefType "journal-article" @default.
- W2056535037 hasAuthorship W2056535037A5001456824 @default.
- W2056535037 hasAuthorship W2056535037A5022487006 @default.
- W2056535037 hasAuthorship W2056535037A5036589972 @default.
- W2056535037 hasAuthorship W2056535037A5080139660 @default.
- W2056535037 hasAuthorship W2056535037A5080853401 @default.
- W2056535037 hasAuthorship W2056535037A5085407857 @default.
- W2056535037 hasConcept C104779481 @default.
- W2056535037 hasConcept C111368507 @default.
- W2056535037 hasConcept C113196181 @default.
- W2056535037 hasConcept C121332964 @default.
- W2056535037 hasConcept C123380192 @default.
- W2056535037 hasConcept C127313418 @default.
- W2056535037 hasConcept C140205800 @default.
- W2056535037 hasConcept C145148216 @default.
- W2056535037 hasConcept C159985019 @default.
- W2056535037 hasConcept C165720898 @default.
- W2056535037 hasConcept C16979985 @default.
- W2056535037 hasConcept C171250308 @default.
- W2056535037 hasConcept C175361016 @default.
- W2056535037 hasConcept C178790620 @default.
- W2056535037 hasConcept C184498911 @default.
- W2056535037 hasConcept C185592680 @default.
- W2056535037 hasConcept C19067145 @default.
- W2056535037 hasConcept C192562407 @default.
- W2056535037 hasConcept C2776523803 @default.
- W2056535037 hasConcept C2776921476 @default.
- W2056535037 hasConcept C2777289219 @default.
- W2056535037 hasConcept C43617362 @default.
- W2056535037 hasConcept C50774322 @default.
- W2056535037 hasConcept C512968161 @default.
- W2056535037 hasConcept C57410435 @default.
- W2056535037 hasConcept C62520636 @default.
- W2056535037 hasConcept C75937256 @default.
- W2056535037 hasConcept C82706917 @default.
- W2056535037 hasConcept C87976508 @default.
- W2056535037 hasConceptScore W2056535037C104779481 @default.
- W2056535037 hasConceptScore W2056535037C111368507 @default.
- W2056535037 hasConceptScore W2056535037C113196181 @default.
- W2056535037 hasConceptScore W2056535037C121332964 @default.
- W2056535037 hasConceptScore W2056535037C123380192 @default.
- W2056535037 hasConceptScore W2056535037C127313418 @default.
- W2056535037 hasConceptScore W2056535037C140205800 @default.
- W2056535037 hasConceptScore W2056535037C145148216 @default.
- W2056535037 hasConceptScore W2056535037C159985019 @default.
- W2056535037 hasConceptScore W2056535037C165720898 @default.
- W2056535037 hasConceptScore W2056535037C16979985 @default.
- W2056535037 hasConceptScore W2056535037C171250308 @default.
- W2056535037 hasConceptScore W2056535037C175361016 @default.
- W2056535037 hasConceptScore W2056535037C178790620 @default.
- W2056535037 hasConceptScore W2056535037C184498911 @default.
- W2056535037 hasConceptScore W2056535037C185592680 @default.
- W2056535037 hasConceptScore W2056535037C19067145 @default.
- W2056535037 hasConceptScore W2056535037C192562407 @default.
- W2056535037 hasConceptScore W2056535037C2776523803 @default.
- W2056535037 hasConceptScore W2056535037C2776921476 @default.
- W2056535037 hasConceptScore W2056535037C2777289219 @default.
- W2056535037 hasConceptScore W2056535037C43617362 @default.
- W2056535037 hasConceptScore W2056535037C50774322 @default.
- W2056535037 hasConceptScore W2056535037C512968161 @default.
- W2056535037 hasConceptScore W2056535037C57410435 @default.
- W2056535037 hasConceptScore W2056535037C62520636 @default.
- W2056535037 hasConceptScore W2056535037C75937256 @default.
- W2056535037 hasConceptScore W2056535037C82706917 @default.
- W2056535037 hasConceptScore W2056535037C87976508 @default.
- W2056535037 hasIssue "1-4" @default.