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- W2056538785 abstract "Si/Si02 and Si/Si3N4 multilayers have been fabricated using a locally made reactive diode if-sputtering systern. 'Ihe layer alternation is obtained by modulating a partial pressure of oxygen or nitrogen near the sample using a silicon target and argon as sputtering gas. 02 and N2 partial pressure conditions were optimized to deposit stoechiornetric Si02 and Si3TV4 films without significant reaction with the silicon target. In-situ kinetic ellipsometry was used to monitore both thick film and multilayer deposition. 'I'he different interfaces appear very sharp with a little contamination of the silicon layers especially using oxygen. The multilayers were characterized by gazing X-ray reflection ( Cu - K line ), and the reflectivity was measured in the soft X-ray range (120 - 350 A ) by synchrolroii radiation. BotI1 Si/Si02 and SiIS13N4 multilayers exhibit well defmed Bragg peaks with very narrow bandpasses ( two to three times lower than the conventional M'/Si multilayer ),and high absolute reflectivities (up to 22% at 1 30 A ). The soft X-ray performances of these mirrors are explained using the physical characteristics deduced from kinetic ellipsometry, grazing X-ray reflection, infrared absorption and transmission electron microscopy measurements." @default.
- W2056538785 created "2016-06-24" @default.
- W2056538785 creator A5029115319 @default.
- W2056538785 creator A5039126517 @default.
- W2056538785 creator A5053146204 @default.
- W2056538785 creator A5073533091 @default.
- W2056538785 creator A5076743852 @default.
- W2056538785 creator A5083229057 @default.
- W2056538785 creator A5090544924 @default.
- W2056538785 creator A5017931605 @default.
- W2056538785 date "1991-02-01" @default.
- W2056538785 modified "2023-09-26" @default.
- W2056538785 title "Silicon/silicon oxide and silicon/silicon nitride multilayers for XUV optical applications" @default.
- W2056538785 doi "https://doi.org/10.1117/12.23176" @default.
- W2056538785 hasPublicationYear "1991" @default.
- W2056538785 type Work @default.
- W2056538785 sameAs 2056538785 @default.
- W2056538785 citedByCount "1" @default.
- W2056538785 crossrefType "proceedings-article" @default.
- W2056538785 hasAuthorship W2056538785A5017931605 @default.
- W2056538785 hasAuthorship W2056538785A5029115319 @default.
- W2056538785 hasAuthorship W2056538785A5039126517 @default.
- W2056538785 hasAuthorship W2056538785A5053146204 @default.
- W2056538785 hasAuthorship W2056538785A5073533091 @default.
- W2056538785 hasAuthorship W2056538785A5076743852 @default.
- W2056538785 hasAuthorship W2056538785A5083229057 @default.
- W2056538785 hasAuthorship W2056538785A5090544924 @default.
- W2056538785 hasConcept C113196181 @default.
- W2056538785 hasConcept C120665830 @default.
- W2056538785 hasConcept C121332964 @default.
- W2056538785 hasConcept C171250308 @default.
- W2056538785 hasConcept C178790620 @default.
- W2056538785 hasConcept C18293161 @default.
- W2056538785 hasConcept C185592680 @default.
- W2056538785 hasConcept C19067145 @default.
- W2056538785 hasConcept C192562407 @default.
- W2056538785 hasConcept C22423302 @default.
- W2056538785 hasConcept C2777431650 @default.
- W2056538785 hasConcept C2778133012 @default.
- W2056538785 hasConcept C2779105228 @default.
- W2056538785 hasConcept C43617362 @default.
- W2056538785 hasConcept C49040817 @default.
- W2056538785 hasConcept C544956773 @default.
- W2056538785 hasConcept C547737533 @default.
- W2056538785 hasConceptScore W2056538785C113196181 @default.
- W2056538785 hasConceptScore W2056538785C120665830 @default.
- W2056538785 hasConceptScore W2056538785C121332964 @default.
- W2056538785 hasConceptScore W2056538785C171250308 @default.
- W2056538785 hasConceptScore W2056538785C178790620 @default.
- W2056538785 hasConceptScore W2056538785C18293161 @default.
- W2056538785 hasConceptScore W2056538785C185592680 @default.
- W2056538785 hasConceptScore W2056538785C19067145 @default.
- W2056538785 hasConceptScore W2056538785C192562407 @default.
- W2056538785 hasConceptScore W2056538785C22423302 @default.
- W2056538785 hasConceptScore W2056538785C2777431650 @default.
- W2056538785 hasConceptScore W2056538785C2778133012 @default.
- W2056538785 hasConceptScore W2056538785C2779105228 @default.
- W2056538785 hasConceptScore W2056538785C43617362 @default.
- W2056538785 hasConceptScore W2056538785C49040817 @default.
- W2056538785 hasConceptScore W2056538785C544956773 @default.
- W2056538785 hasConceptScore W2056538785C547737533 @default.
- W2056538785 hasLocation W20565387851 @default.
- W2056538785 hasLocation W20565387852 @default.
- W2056538785 hasLocation W20565387853 @default.
- W2056538785 hasOpenAccess W2056538785 @default.
- W2056538785 hasPrimaryLocation W20565387851 @default.
- W2056538785 hasRelatedWork W1982758944 @default.
- W2056538785 hasRelatedWork W2004101257 @default.
- W2056538785 hasRelatedWork W2046778708 @default.
- W2056538785 hasRelatedWork W2052907601 @default.
- W2056538785 hasRelatedWork W2056538785 @default.
- W2056538785 hasRelatedWork W2066346259 @default.
- W2056538785 hasRelatedWork W2132789743 @default.
- W2056538785 hasRelatedWork W2135748303 @default.
- W2056538785 hasRelatedWork W2156789960 @default.
- W2056538785 hasRelatedWork W4295539969 @default.
- W2056538785 isParatext "false" @default.
- W2056538785 isRetracted "false" @default.
- W2056538785 magId "2056538785" @default.
- W2056538785 workType "article" @default.