FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056539372> ?p ?o ?g. }

• W2056539372 endingPage "8964" @default.
• W2056539372 startingPage "8955" @default.
• W2056539372 abstract "In this work we examine the accuracy of plasma neutral temperature estimates by fitting the rotational band envelope of different diatomic species in emission. Experiments are performed in an inductively coupled CF4 plasma generated in a Gaseous Electronics Conference reference cell. Visible and ultraviolet emission spectra are collected at a power of 300 W (∼0.7 W/cm3) and pressure of 30 mTorr. The emission bands of several molecules (CF, CN, C2, CO, and SiF) are fit simultaneously for rotational and vibrational temperatures and compared. Four different rotational temperatures are obtained: 1250 K for CF and CN, 1600 K for CO, 1800 K for C2, and 2300 K for SiF. The vibrational temperatures obtained vary from 1750 to 5950 K, with the higher vibrational temperatures generally corresponding to the lower rotational temperatures. These results suggest that the different species have achieved different degrees of equilibration between rotational and vibrational modes and may not be equilibrated with the translational temperatures. The different temperatures also appear to relate to the expected spacial distribution of the molecules, with species expected to form near the electrode (C2, CO, SiF) having higher temperatures than species formed in the bulk." @default.
• W2056539372 created "2016-06-24" @default.
• W2056539372 creator A5004860696 @default.
• W2056539372 creator A5010735432 @default.
• W2056539372 creator A5070581515 @default.
• W2056539372 creator A5070999670 @default.
• W2056539372 date "2002-05-20" @default.
• W2056539372 modified "2023-10-13" @default.
• W2056539372 title "Neutral gas temperature estimates in an inductively coupled CF4 plasma by fitting diatomic emission spectra" @default.
• W2056539372 cites W11039 @default.
• W2056539372 cites W1610574370 @default.
• W2056539372 cites W1965795041 @default.
• W2056539372 cites W1978197502 @default.
• W2056539372 cites W1985461386 @default.
• W2056539372 cites W1989033083 @default.
• W2056539372 cites W1990375660 @default.
• W2056539372 cites W2000932723 @default.
• W2056539372 cites W2001393400 @default.
• W2056539372 cites W2010011681 @default.
• W2056539372 cites W2016813840 @default.
• W2056539372 cites W2020557462 @default.
• W2056539372 cites W2026556362 @default.
• W2056539372 cites W2027708698 @default.
• W2056539372 cites W2029543996 @default.
• W2056539372 cites W2029614243 @default.
• W2056539372 cites W2034680614 @default.
• W2056539372 cites W2036794519 @default.
• W2056539372 cites W2039211454 @default.
• W2056539372 cites W2043806258 @default.
• W2056539372 cites W2045027252 @default.
• W2056539372 cites W2051177279 @default.
• W2056539372 cites W2051848899 @default.
• W2056539372 cites W2052643078 @default.
• W2056539372 cites W2053634370 @default.
• W2056539372 cites W2057615593 @default.
• W2056539372 cites W2070328893 @default.
• W2056539372 cites W2070491991 @default.
• W2056539372 cites W2086722021 @default.
• W2056539372 cites W2087335372 @default.
• W2056539372 cites W2092851024 @default.
• W2056539372 cites W2095042184 @default.
• W2056539372 cites W2147676518 @default.
• W2056539372 cites W2228389583 @default.
• W2056539372 doi "https://doi.org/10.1063/1.1474614" @default.
• W2056539372 hasPublicationYear "2002" @default.
• W2056539372 type Work @default.
• W2056539372 sameAs 2056539372 @default.
• W2056539372 citedByCount "67" @default.
• W2056539372 countsByYear W20565393722012 @default.
• W2056539372 countsByYear W20565393722013 @default.
• W2056539372 countsByYear W20565393722014 @default.
• W2056539372 countsByYear W20565393722015 @default.
• W2056539372 countsByYear W20565393722016 @default.
• W2056539372 countsByYear W20565393722017 @default.
• W2056539372 countsByYear W20565393722018 @default.
• W2056539372 countsByYear W20565393722020 @default.
• W2056539372 countsByYear W20565393722021 @default.
• W2056539372 countsByYear W20565393722022 @default.
• W2056539372 crossrefType "journal-article" @default.
• W2056539372 hasAuthorship W2056539372A5004860696 @default.
• W2056539372 hasAuthorship W2056539372A5010735432 @default.
• W2056539372 hasAuthorship W2056539372A5070581515 @default.
• W2056539372 hasAuthorship W2056539372A5070999670 @default.
• W2056539372 hasBestOaLocation W20565393722 @default.
• W2056539372 hasConcept C111806078 @default.
• W2056539372 hasConcept C113196181 @default.
• W2056539372 hasConcept C121332964 @default.
• W2056539372 hasConcept C1276947 @default.
• W2056539372 hasConcept C145148216 @default.
• W2056539372 hasConcept C16951817 @default.
• W2056539372 hasConcept C178790620 @default.
• W2056539372 hasConcept C181500209 @default.
• W2056539372 hasConcept C184779094 @default.
• W2056539372 hasConcept C185592680 @default.
• W2056539372 hasConcept C2776077392 @default.
• W2056539372 hasConcept C32909587 @default.
• W2056539372 hasConcept C43503373 @default.
• W2056539372 hasConcept C43617362 @default.
• W2056539372 hasConcept C4839761 @default.
• W2056539372 hasConcept C62520636 @default.
• W2056539372 hasConcept C82706917 @default.
• W2056539372 hasConcept C95974651 @default.
• W2056539372 hasConcept C96141758 @default.
• W2056539372 hasConceptScore W2056539372C111806078 @default.
• W2056539372 hasConceptScore W2056539372C113196181 @default.
• W2056539372 hasConceptScore W2056539372C121332964 @default.
• W2056539372 hasConceptScore W2056539372C1276947 @default.
• W2056539372 hasConceptScore W2056539372C145148216 @default.
• W2056539372 hasConceptScore W2056539372C16951817 @default.
• W2056539372 hasConceptScore W2056539372C178790620 @default.
• W2056539372 hasConceptScore W2056539372C181500209 @default.
• W2056539372 hasConceptScore W2056539372C184779094 @default.
• W2056539372 hasConceptScore W2056539372C185592680 @default.
• W2056539372 hasConceptScore W2056539372C2776077392 @default.
• W2056539372 hasConceptScore W2056539372C32909587 @default.
• W2056539372 hasConceptScore W2056539372C43503373 @default.
• W2056539372 hasConceptScore W2056539372C43617362 @default.
• W2056539372 hasConceptScore W2056539372C4839761 @default.

• next