Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056548319> ?p ?o ?g. }
- W2056548319 endingPage "084201" @default.
- W2056548319 startingPage "084201" @default.
- W2056548319 abstract "A new polycrystalline silicon (poly-Si) lateral double-diffusion metal oxide semiconductor field-effect transistor power device combining super-lateral-growth technology and shielding-trench oxide structures (STO-LDMOSFET) is introduced. The trench oxide offers a platform for amorphous silicon lateral growth through excimer laser annealing; this not only enables stable control of the crystallization of poly-Si but also promotes the blocking ability of devices. The breakdown voltages of the manufactured devices with and without trench oxide are 460 and 387 V, respectively, increasing by approximately 73 V. The characteristics of poly-Si treated with an excimer laser were obtained by low-temperature poly-Si LDMOSFET (LTPS-LDMOSFET) measurement and simulation. Then, STO-LDMOSFETs were studied by simulation. The results showed that the STO-LDMOSFET with a 150 cm 2 V -1 s -1 mobility had a breakdown voltage and a specific on-resistance of approximately 450 V and 16 Ω cm 2 , respectively, at a 40 µm drift region length." @default.
- W2056548319 created "2016-06-24" @default.
- W2056548319 creator A5008760634 @default.
- W2056548319 creator A5044348207 @default.
- W2056548319 date "2013-07-23" @default.
- W2056548319 modified "2023-10-18" @default.
- W2056548319 title "Design and Analysis of Power Low-Temperature Polysilicon Lateral Double-Diffusion Metal Oxide Semiconductor Field Effect Transistors with Shielding-Trench Structure" @default.
- W2056548319 cites W1963914391 @default.
- W2056548319 cites W1976204651 @default.
- W2056548319 cites W1979596989 @default.
- W2056548319 cites W1980923663 @default.
- W2056548319 cites W1983338346 @default.
- W2056548319 cites W2008816062 @default.
- W2056548319 cites W2013972601 @default.
- W2056548319 cites W2016818594 @default.
- W2056548319 cites W2026934616 @default.
- W2056548319 cites W2029070382 @default.
- W2056548319 cites W2036135265 @default.
- W2056548319 cites W2042098763 @default.
- W2056548319 cites W2043439067 @default.
- W2056548319 cites W2081776754 @default.
- W2056548319 cites W2083549953 @default.
- W2056548319 cites W2087169635 @default.
- W2056548319 cites W2088134779 @default.
- W2056548319 cites W2104330623 @default.
- W2056548319 cites W2107344973 @default.
- W2056548319 cites W2147518633 @default.
- W2056548319 cites W2150471110 @default.
- W2056548319 cites W2153964354 @default.
- W2056548319 cites W2159662194 @default.
- W2056548319 cites W2159978926 @default.
- W2056548319 cites W2168184315 @default.
- W2056548319 doi "https://doi.org/10.7567/jjap.52.084201" @default.
- W2056548319 hasPublicationYear "2013" @default.
- W2056548319 type Work @default.
- W2056548319 sameAs 2056548319 @default.
- W2056548319 citedByCount "0" @default.
- W2056548319 crossrefType "journal-article" @default.
- W2056548319 hasAuthorship W2056548319A5008760634 @default.
- W2056548319 hasAuthorship W2056548319A5044348207 @default.
- W2056548319 hasConcept C105066941 @default.
- W2056548319 hasConcept C119321828 @default.
- W2056548319 hasConcept C119599485 @default.
- W2056548319 hasConcept C120665830 @default.
- W2056548319 hasConcept C121332964 @default.
- W2056548319 hasConcept C127413603 @default.
- W2056548319 hasConcept C155310634 @default.
- W2056548319 hasConcept C159985019 @default.
- W2056548319 hasConcept C165801399 @default.
- W2056548319 hasConcept C171250308 @default.
- W2056548319 hasConcept C172385210 @default.
- W2056548319 hasConcept C191897082 @default.
- W2056548319 hasConcept C192562407 @default.
- W2056548319 hasConcept C2776390347 @default.
- W2056548319 hasConcept C2777855556 @default.
- W2056548319 hasConcept C2779227376 @default.
- W2056548319 hasConcept C2779667780 @default.
- W2056548319 hasConcept C2779851234 @default.
- W2056548319 hasConcept C2780477314 @default.
- W2056548319 hasConcept C2780565262 @default.
- W2056548319 hasConcept C49040817 @default.
- W2056548319 hasConcept C520434653 @default.
- W2056548319 hasConcept C544956773 @default.
- W2056548319 hasConcept C87359718 @default.
- W2056548319 hasConceptScore W2056548319C105066941 @default.
- W2056548319 hasConceptScore W2056548319C119321828 @default.
- W2056548319 hasConceptScore W2056548319C119599485 @default.
- W2056548319 hasConceptScore W2056548319C120665830 @default.
- W2056548319 hasConceptScore W2056548319C121332964 @default.
- W2056548319 hasConceptScore W2056548319C127413603 @default.
- W2056548319 hasConceptScore W2056548319C155310634 @default.
- W2056548319 hasConceptScore W2056548319C159985019 @default.
- W2056548319 hasConceptScore W2056548319C165801399 @default.
- W2056548319 hasConceptScore W2056548319C171250308 @default.
- W2056548319 hasConceptScore W2056548319C172385210 @default.
- W2056548319 hasConceptScore W2056548319C191897082 @default.
- W2056548319 hasConceptScore W2056548319C192562407 @default.
- W2056548319 hasConceptScore W2056548319C2776390347 @default.
- W2056548319 hasConceptScore W2056548319C2777855556 @default.
- W2056548319 hasConceptScore W2056548319C2779227376 @default.
- W2056548319 hasConceptScore W2056548319C2779667780 @default.
- W2056548319 hasConceptScore W2056548319C2779851234 @default.
- W2056548319 hasConceptScore W2056548319C2780477314 @default.
- W2056548319 hasConceptScore W2056548319C2780565262 @default.
- W2056548319 hasConceptScore W2056548319C49040817 @default.
- W2056548319 hasConceptScore W2056548319C520434653 @default.
- W2056548319 hasConceptScore W2056548319C544956773 @default.
- W2056548319 hasConceptScore W2056548319C87359718 @default.
- W2056548319 hasIssue "8R" @default.
- W2056548319 hasLocation W20565483191 @default.
- W2056548319 hasOpenAccess W2056548319 @default.
- W2056548319 hasPrimaryLocation W20565483191 @default.
- W2056548319 hasRelatedWork W1966564830 @default.
- W2056548319 hasRelatedWork W2019843590 @default.
- W2056548319 hasRelatedWork W2055652473 @default.
- W2056548319 hasRelatedWork W2056548319 @default.
- W2056548319 hasRelatedWork W2102032347 @default.
- W2056548319 hasRelatedWork W2126998284 @default.