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- W2056564147 abstract "A GaN blue light emitting diode (LED) and Si photodiodes (PDs) are integrated monolithically on Si substrate for a micro optical displacement encoder sensor. A GaN-LED crystal layer was grown epitaxially on a Si substrate. Si pn-junction was formed subsequently on the Si substrate by P ion implantation. Therefore, all components necessary for the encoder sensor are integrated on a Si chip after patterning encoder gratings. The blue light is useful for improving diffraction effect and suitable for Si photodetector." @default.
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- W2056564147 date "2013-06-01" @default.
- W2056564147 modified "2023-09-25" @default.
- W2056564147 title "Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes" @default.
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- W2056564147 doi "https://doi.org/10.1109/transducers.2013.6626931" @default.
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