Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056567615> ?p ?o ?g. }
Showing items 1 to 48 of
48
with 100 items per page.
- W2056567615 abstract "The detection, classification and disposition of defects is an important function that commands significant resources in mask making. Current processes use manual evaluation of defects, which is slow, subject to errors, and provides sparse data for process improvement. The automated defect analysis software described here reads inspection reports from mask inspection tools, classifies each defect, and measures both its size and printability. It combines and compares data from multiple inspections to provide critical process development data. Data from 144 masks is presented showing that the system missed no critical defects found by operators. These inspections also demonstrated numerous occasions for improved classifications compared to that given by the operators. This capability gives improved disposition, an easy path to using simulator based printability for disposition, and significant improvements in mask yield." @default.
- W2056567615 created "2016-06-24" @default.
- W2056567615 creator A5042721805 @default.
- W2056567615 creator A5073249312 @default.
- W2056567615 creator A5091326712 @default.
- W2056567615 date "2005-06-28" @default.
- W2056567615 modified "2023-09-27" @default.
- W2056567615 title "An automated mask defect analysis system for increasing mask shop productivity" @default.
- W2056567615 doi "https://doi.org/10.1117/12.617339" @default.
- W2056567615 hasPublicationYear "2005" @default.
- W2056567615 type Work @default.
- W2056567615 sameAs 2056567615 @default.
- W2056567615 citedByCount "3" @default.
- W2056567615 crossrefType "proceedings-article" @default.
- W2056567615 hasAuthorship W2056567615A5042721805 @default.
- W2056567615 hasAuthorship W2056567615A5073249312 @default.
- W2056567615 hasAuthorship W2056567615A5091326712 @default.
- W2056567615 hasConcept C117671659 @default.
- W2056567615 hasConcept C127413603 @default.
- W2056567615 hasConcept C139719470 @default.
- W2056567615 hasConcept C162324750 @default.
- W2056567615 hasConcept C199639397 @default.
- W2056567615 hasConcept C204983608 @default.
- W2056567615 hasConcept C41008148 @default.
- W2056567615 hasConceptScore W2056567615C117671659 @default.
- W2056567615 hasConceptScore W2056567615C127413603 @default.
- W2056567615 hasConceptScore W2056567615C139719470 @default.
- W2056567615 hasConceptScore W2056567615C162324750 @default.
- W2056567615 hasConceptScore W2056567615C199639397 @default.
- W2056567615 hasConceptScore W2056567615C204983608 @default.
- W2056567615 hasConceptScore W2056567615C41008148 @default.
- W2056567615 hasLocation W20565676151 @default.
- W2056567615 hasOpenAccess W2056567615 @default.
- W2056567615 hasPrimaryLocation W20565676151 @default.
- W2056567615 hasRelatedWork W193737139 @default.
- W2056567615 hasRelatedWork W1994836916 @default.
- W2056567615 hasRelatedWork W2098262341 @default.
- W2056567615 hasRelatedWork W2899750186 @default.
- W2056567615 hasRelatedWork W3025814608 @default.
- W2056567615 hasRelatedWork W3195489254 @default.
- W2056567615 hasRelatedWork W4292071975 @default.
- W2056567615 hasRelatedWork W4361763460 @default.
- W2056567615 hasRelatedWork W589917918 @default.
- W2056567615 hasRelatedWork W320082514 @default.
- W2056567615 isParatext "false" @default.
- W2056567615 isRetracted "false" @default.
- W2056567615 magId "2056567615" @default.
- W2056567615 workType "article" @default.