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- W2056578699 abstract "The p + -n junction capacitance characteristics have been analyzed by a novel three-dimensional impurity profiling method using chemical etching and scanning tunneling microscopy. The calculated capacitance-voltage characteristics for plane and side-wall capacitances agree better with the measured characteristics than does the case with conventional SIMS analysis. It is found that the C-V characteristics for side-wall capacitance scarcely depend on the impurity profile. Moreover, the obtained side-wall capacitance value enables a more accurate simulation of circuit performance. These results show that the proposed STM profiling method is a promising tool for the characterization of submicrometer devices." @default.
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- W2056578699 date "1991-12-01" @default.
- W2056578699 modified "2023-09-27" @default.
- W2056578699 title "Analysis of p<sup>+</sup>-n Junction Capacitance with Three-Dimensional Impurity Profiling Method Using Scanning Tunneling Microscopy" @default.
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- W2056578699 doi "https://doi.org/10.1143/jjap.30.3638" @default.
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