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• W2056588202 endingPage "2727" @default.
• W2056588202 startingPage "2720" @default.
• W2056588202 abstract "The microstructural properties of stoichiometric surface and buried Si3N4 films, fabricated with 15N ion implantation into Si wafers, are studied using the extended x-ray absorption fine structure (EXAFS) and near-edge x-ray absorption fine structure (NEXAFS) spectroscopies. Complementary information about the film composition and structure is provided by nuclear reaction analysis (NRA) and cross-section transmission electron microscopy (XTEM). The films have been characterized in the as-implanted state and after annealing in the temperature range 1100–1200 °C. For all the examined films, the N/Si ratio at the peak of the nitrogen profile, as measured by NRA is 1.33, a value that corresponds to stoichiometric nitrides. However, small compositional deviations towards a N-rich composition are detected by EXAFS in the surface nitrides. The excess nitrogen is also detectable in the NEXAFS spectra, where it introduces a characteristic resonance line superimposed to the absorption edge. Finally, XTEM observations confirm the formation of the nitride layers and reveal different degrees of damage at the Si3N4/Si interface for the low and high energy implantations, respectively." @default.
• W2056588202 created "2016-06-24" @default.
• W2056588202 creator A5040361412 @default.
• W2056588202 creator A5043496504 @default.
• W2056588202 creator A5078174493 @default.
• W2056588202 date "1996-09-01" @default.
• W2056588202 modified "2023-09-24" @default.
• W2056588202 title "Characterization of stoichiometric surface and buried SiN films fabricated by ion implantation using extended x‐ray absorption fine structure" @default.
• W2056588202 cites W1967367559 @default.
• W2056588202 cites W1972096513 @default.
• W2056588202 cites W1978487384 @default.
• W2056588202 cites W1986888714 @default.
• W2056588202 cites W1994248966 @default.
• W2056588202 cites W2004223352 @default.
• W2056588202 cites W2024172140 @default.
• W2056588202 cites W2028428457 @default.
• W2056588202 cites W2037553662 @default.
• W2056588202 cites W2038520453 @default.
• W2056588202 cites W2042792306 @default.
• W2056588202 cites W2045912708 @default.
• W2056588202 cites W2052774894 @default.
• W2056588202 cites W2060373561 @default.
• W2056588202 cites W2061332711 @default.
• W2056588202 cites W2061509735 @default.
• W2056588202 cites W2069705357 @default.
• W2056588202 cites W2074410446 @default.
• W2056588202 cites W2111397230 @default.
• W2056588202 cites W2527695337 @default.
• W2056588202 doi "https://doi.org/10.1063/1.363189" @default.
• W2056588202 hasPublicationYear "1996" @default.
• W2056588202 type Work @default.
• W2056588202 sameAs 2056588202 @default.
• W2056588202 citedByCount "12" @default.
• W2056588202 countsByYear W20565882022020 @default.
• W2056588202 crossrefType "journal-article" @default.
• W2056588202 hasAuthorship W2056588202A5040361412 @default.
• W2056588202 hasAuthorship W2056588202A5043496504 @default.
• W2056588202 hasAuthorship W2056588202A5078174493 @default.
• W2056588202 hasConcept C107861141 @default.
• W2056588202 hasConcept C110715899 @default.
• W2056588202 hasConcept C113196181 @default.
• W2056588202 hasConcept C119824511 @default.
• W2056588202 hasConcept C120665830 @default.
• W2056588202 hasConcept C121332964 @default.
• W2056588202 hasConcept C125287762 @default.
• W2056588202 hasConcept C1276947 @default.
• W2056588202 hasConcept C144082473 @default.
• W2056588202 hasConcept C145148216 @default.
• W2056588202 hasConcept C146088050 @default.
• W2056588202 hasConcept C147789679 @default.
• W2056588202 hasConcept C159985019 @default.
• W2056588202 hasConcept C160671074 @default.
• W2056588202 hasConcept C171250308 @default.
• W2056588202 hasConcept C178790620 @default.
• W2056588202 hasConcept C185592680 @default.
• W2056588202 hasConcept C191897082 @default.
• W2056588202 hasConcept C192562407 @default.
• W2056588202 hasConcept C194760766 @default.
• W2056588202 hasConcept C2777855556 @default.
• W2056588202 hasConcept C2779227376 @default.
• W2056588202 hasConcept C2780839960 @default.
• W2056588202 hasConcept C41823505 @default.
• W2056588202 hasConcept C43617362 @default.
• W2056588202 hasConcept C4839761 @default.
• W2056588202 hasConcept C49040817 @default.
• W2056588202 hasConceptScore W2056588202C107861141 @default.
• W2056588202 hasConceptScore W2056588202C110715899 @default.
• W2056588202 hasConceptScore W2056588202C113196181 @default.
• W2056588202 hasConceptScore W2056588202C119824511 @default.
• W2056588202 hasConceptScore W2056588202C120665830 @default.
• W2056588202 hasConceptScore W2056588202C121332964 @default.
• W2056588202 hasConceptScore W2056588202C125287762 @default.
• W2056588202 hasConceptScore W2056588202C1276947 @default.
• W2056588202 hasConceptScore W2056588202C144082473 @default.
• W2056588202 hasConceptScore W2056588202C145148216 @default.
• W2056588202 hasConceptScore W2056588202C146088050 @default.
• W2056588202 hasConceptScore W2056588202C147789679 @default.
• W2056588202 hasConceptScore W2056588202C159985019 @default.
• W2056588202 hasConceptScore W2056588202C160671074 @default.
• W2056588202 hasConceptScore W2056588202C171250308 @default.
• W2056588202 hasConceptScore W2056588202C178790620 @default.
• W2056588202 hasConceptScore W2056588202C185592680 @default.
• W2056588202 hasConceptScore W2056588202C191897082 @default.
• W2056588202 hasConceptScore W2056588202C192562407 @default.
• W2056588202 hasConceptScore W2056588202C194760766 @default.
• W2056588202 hasConceptScore W2056588202C2777855556 @default.
• W2056588202 hasConceptScore W2056588202C2779227376 @default.
• W2056588202 hasConceptScore W2056588202C2780839960 @default.
• W2056588202 hasConceptScore W2056588202C41823505 @default.
• W2056588202 hasConceptScore W2056588202C43617362 @default.
• W2056588202 hasConceptScore W2056588202C4839761 @default.
• W2056588202 hasConceptScore W2056588202C49040817 @default.
• W2056588202 hasIssue "5" @default.
• W2056588202 hasLocation W20565882021 @default.
• W2056588202 hasOpenAccess W2056588202 @default.
• W2056588202 hasPrimaryLocation W20565882021 @default.
• W2056588202 hasRelatedWork W146349435 @default.
• W2056588202 hasRelatedWork W1481886130 @default.

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