Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056598169> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2056598169 abstract "The paper deals with the impact of intensive electron attachment on the kinetics of the electrons in the active zone of the stationary band-like beam discharge plasma in SF6 which is an alternative useful plasma medium for “dry etching”. The energy distribution of the electrons in this plasma was obtained by numerically solving the Boltzmann equation which includes apart from elastic collisions, different exciting collision processes, attachment in electron collisions, direct ionization, the ambipolar loss of electrons, Coulomb interaction between electrons and of electrons with ions and the power input to the electrons by the turbulent electric field. In particular, due to the needed fulfilment of the consistent electron particle balance, for an extended region of the turbulence energy density in this plasma a large impact on the electron kinetics of the intensive electron attachment, which is the prevailing electron loss process, was found enforcing independent of the turbulence energy density always a large power input to the electrons, smooth and only slowly decreasing energy distributions even in the energy region of direct ionization." @default.
- W2056598169 created "2016-06-24" @default.
- W2056598169 creator A5015459357 @default.
- W2056598169 creator A5029607622 @default.
- W2056598169 creator A5063423367 @default.
- W2056598169 creator A5088912574 @default.
- W2056598169 date "1985-01-01" @default.
- W2056598169 modified "2023-09-24" @default.
- W2056598169 title "On the Kinetics of the Active Zone of the Stationary SF6 Beam Discharge Plasma" @default.
- W2056598169 cites W1492899691 @default.
- W2056598169 cites W1583908057 @default.
- W2056598169 cites W1965180472 @default.
- W2056598169 cites W1974952997 @default.
- W2056598169 cites W2003641531 @default.
- W2056598169 cites W2007916502 @default.
- W2056598169 cites W2020861281 @default.
- W2056598169 cites W2021584099 @default.
- W2056598169 cites W2023172155 @default.
- W2056598169 cites W2032227296 @default.
- W2056598169 cites W2034188216 @default.
- W2056598169 cites W2044732239 @default.
- W2056598169 cites W2051818448 @default.
- W2056598169 cites W2055386313 @default.
- W2056598169 cites W2055622747 @default.
- W2056598169 cites W2073486766 @default.
- W2056598169 cites W2074797857 @default.
- W2056598169 cites W2086210881 @default.
- W2056598169 cites W2087731377 @default.
- W2056598169 cites W2088551061 @default.
- W2056598169 cites W2088591752 @default.
- W2056598169 cites W4206195727 @default.
- W2056598169 cites W4241609964 @default.
- W2056598169 cites W4241804743 @default.
- W2056598169 cites W4254103462 @default.
- W2056598169 doi "https://doi.org/10.1002/ctpp.19850250210" @default.
- W2056598169 hasPublicationYear "1985" @default.
- W2056598169 type Work @default.
- W2056598169 sameAs 2056598169 @default.
- W2056598169 citedByCount "0" @default.
- W2056598169 crossrefType "journal-article" @default.
- W2056598169 hasAuthorship W2056598169A5015459357 @default.
- W2056598169 hasAuthorship W2056598169A5029607622 @default.
- W2056598169 hasAuthorship W2056598169A5063423367 @default.
- W2056598169 hasAuthorship W2056598169A5088912574 @default.
- W2056598169 hasConcept C121332964 @default.
- W2056598169 hasConcept C145148216 @default.
- W2056598169 hasConcept C147120987 @default.
- W2056598169 hasConcept C184779094 @default.
- W2056598169 hasConcept C185544564 @default.
- W2056598169 hasConcept C192562407 @default.
- W2056598169 hasConcept C198291218 @default.
- W2056598169 hasConcept C25621703 @default.
- W2056598169 hasConcept C34667332 @default.
- W2056598169 hasConcept C62520636 @default.
- W2056598169 hasConcept C82706917 @default.
- W2056598169 hasConceptScore W2056598169C121332964 @default.
- W2056598169 hasConceptScore W2056598169C145148216 @default.
- W2056598169 hasConceptScore W2056598169C147120987 @default.
- W2056598169 hasConceptScore W2056598169C184779094 @default.
- W2056598169 hasConceptScore W2056598169C185544564 @default.
- W2056598169 hasConceptScore W2056598169C192562407 @default.
- W2056598169 hasConceptScore W2056598169C198291218 @default.
- W2056598169 hasConceptScore W2056598169C25621703 @default.
- W2056598169 hasConceptScore W2056598169C34667332 @default.
- W2056598169 hasConceptScore W2056598169C62520636 @default.
- W2056598169 hasConceptScore W2056598169C82706917 @default.
- W2056598169 hasLocation W20565981691 @default.
- W2056598169 hasOpenAccess W2056598169 @default.
- W2056598169 hasPrimaryLocation W20565981691 @default.
- W2056598169 hasRelatedWork W1671094586 @default.
- W2056598169 hasRelatedWork W17903731 @default.
- W2056598169 hasRelatedWork W1973238821 @default.
- W2056598169 hasRelatedWork W1975514460 @default.
- W2056598169 hasRelatedWork W1984845912 @default.
- W2056598169 hasRelatedWork W1986965865 @default.
- W2056598169 hasRelatedWork W1997250797 @default.
- W2056598169 hasRelatedWork W2020435258 @default.
- W2056598169 hasRelatedWork W2027652024 @default.
- W2056598169 hasRelatedWork W2051214337 @default.
- W2056598169 hasRelatedWork W2080277127 @default.
- W2056598169 hasRelatedWork W2087520470 @default.
- W2056598169 hasRelatedWork W2314655685 @default.
- W2056598169 hasRelatedWork W2336965158 @default.
- W2056598169 hasRelatedWork W2405068703 @default.
- W2056598169 hasRelatedWork W2531023886 @default.
- W2056598169 hasRelatedWork W2890373504 @default.
- W2056598169 hasRelatedWork W2963819081 @default.
- W2056598169 hasRelatedWork W3092568700 @default.
- W2056598169 hasRelatedWork W3120497002 @default.
- W2056598169 isParatext "false" @default.
- W2056598169 isRetracted "false" @default.
- W2056598169 magId "2056598169" @default.
- W2056598169 workType "article" @default.