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- W2056681056 abstract "Abstract Carbon films with diamond-like properties were deposited onto silicon by r.f. plasma decomposition of methane. Three series of films deposited in a range of substrate biases, onto unrefrigerated or heated substrates, have been analysed by secondary ion mass spectrometry. The sputter rate, the Si—C transition width and the C2:C3 signal ratio vary with the substrate bias and present a critical point at about 450 V." @default.
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- W2056681056 date "1991-10-01" @default.
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- W2056681056 title "Study of diamond-like carbon films by secondary ion mass spectrometry" @default.
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- W2056681056 doi "https://doi.org/10.1016/0040-6090(91)90468-d" @default.
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