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- W2056772495 abstract "In the last decade we have developed thermal reactive co-evaporation as a technique to produce high quality YBCO and other oxide films of very large size up to 9 inches in diameter. This was achieved by intermittent deposition and reaction with oxygen using a heater which rotates the substrate in and out of an oxygen pocket. Even larger substrates, e. g. coated conductors, cannot be rotated. Therefore we have recently developed a new setup where the substrate is held fixed, and the oxygen pocket is set in linear reciprocation. This technique allows simultaneous deposition on a square of 20×20 cm2. Moreover, we have developed an instant refill mechanism for the thermal boats, and stable rate control by atomic absorption spectroscopy (AAS), in order to obtain a continuous process suitable for small scale mass production." @default.
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- W2056772495 date "1997-08-01" @default.
- W2056772495 modified "2023-10-06" @default.
- W2056772495 title "YBCO film deposition on very large areas up to 20×20 cm2" @default.
- W2056772495 cites W1964397786 @default.
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- W2056772495 doi "https://doi.org/10.1016/s0921-4534(97)00230-x" @default.
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