Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056804519> ?p ?o ?g. }
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- W2056804519 endingPage "1096" @default.
- W2056804519 startingPage "1093" @default.
- W2056804519 abstract "This paper explores the possibility of producing amorphous and nanocrystalline silicon using very high frequency PECVD at a low substrate temperature of 123 °C at high deposition rate of 0.4-0.7 nm/s. The quality of these amorphous layers remains similar to that obtained in layers deposited at low deposition rate of 0.1 nm/s. The amorphous-to-nanocrystalline transition is sensitive to deposition chamber history. The microstructure parameter of the best nanocrystalline layers amounts to 0.4. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2056804519 created "2016-06-24" @default.
- W2056804519 creator A5010533673 @default.
- W2056804519 creator A5040252854 @default.
- W2056804519 creator A5072836620 @default.
- W2056804519 date "2010-03-23" @default.
- W2056804519 modified "2023-09-25" @default.
- W2056804519 title "Thin film silicon deposited at 100 °C by VHF PECVD: optoelectronic properties and incorporation in solar cells" @default.
- W2056804519 doi "https://doi.org/10.1002/pssc.200982879" @default.
- W2056804519 hasPublicationYear "2010" @default.
- W2056804519 type Work @default.
- W2056804519 sameAs 2056804519 @default.
- W2056804519 citedByCount "4" @default.
- W2056804519 countsByYear W20568045192012 @default.
- W2056804519 countsByYear W20568045192013 @default.
- W2056804519 crossrefType "journal-article" @default.
- W2056804519 hasAuthorship W2056804519A5010533673 @default.
- W2056804519 hasAuthorship W2056804519A5040252854 @default.
- W2056804519 hasAuthorship W2056804519A5072836620 @default.
- W2056804519 hasConcept C111368507 @default.
- W2056804519 hasConcept C127313418 @default.
- W2056804519 hasConcept C140676511 @default.
- W2056804519 hasConcept C151730666 @default.
- W2056804519 hasConcept C159985019 @default.
- W2056804519 hasConcept C171250308 @default.
- W2056804519 hasConcept C185592680 @default.
- W2056804519 hasConcept C19067145 @default.
- W2056804519 hasConcept C192562407 @default.
- W2056804519 hasConcept C2776390347 @default.
- W2056804519 hasConcept C2777289219 @default.
- W2056804519 hasConcept C2779667780 @default.
- W2056804519 hasConcept C2780824857 @default.
- W2056804519 hasConcept C2816523 @default.
- W2056804519 hasConcept C38347018 @default.
- W2056804519 hasConcept C49040817 @default.
- W2056804519 hasConcept C544956773 @default.
- W2056804519 hasConcept C56052488 @default.
- W2056804519 hasConcept C64297162 @default.
- W2056804519 hasConcept C80086925 @default.
- W2056804519 hasConcept C8010536 @default.
- W2056804519 hasConcept C87976508 @default.
- W2056804519 hasConceptScore W2056804519C111368507 @default.
- W2056804519 hasConceptScore W2056804519C127313418 @default.
- W2056804519 hasConceptScore W2056804519C140676511 @default.
- W2056804519 hasConceptScore W2056804519C151730666 @default.
- W2056804519 hasConceptScore W2056804519C159985019 @default.
- W2056804519 hasConceptScore W2056804519C171250308 @default.
- W2056804519 hasConceptScore W2056804519C185592680 @default.
- W2056804519 hasConceptScore W2056804519C19067145 @default.
- W2056804519 hasConceptScore W2056804519C192562407 @default.
- W2056804519 hasConceptScore W2056804519C2776390347 @default.
- W2056804519 hasConceptScore W2056804519C2777289219 @default.
- W2056804519 hasConceptScore W2056804519C2779667780 @default.
- W2056804519 hasConceptScore W2056804519C2780824857 @default.
- W2056804519 hasConceptScore W2056804519C2816523 @default.
- W2056804519 hasConceptScore W2056804519C38347018 @default.
- W2056804519 hasConceptScore W2056804519C49040817 @default.
- W2056804519 hasConceptScore W2056804519C544956773 @default.
- W2056804519 hasConceptScore W2056804519C56052488 @default.
- W2056804519 hasConceptScore W2056804519C64297162 @default.
- W2056804519 hasConceptScore W2056804519C80086925 @default.
- W2056804519 hasConceptScore W2056804519C8010536 @default.
- W2056804519 hasConceptScore W2056804519C87976508 @default.
- W2056804519 hasIssue "3-4" @default.
- W2056804519 hasLocation W20568045191 @default.
- W2056804519 hasOpenAccess W2056804519 @default.
- W2056804519 hasPrimaryLocation W20568045191 @default.
- W2056804519 hasRelatedWork W1964070329 @default.
- W2056804519 hasRelatedWork W1971193721 @default.
- W2056804519 hasRelatedWork W1982633940 @default.
- W2056804519 hasRelatedWork W2056804519 @default.
- W2056804519 hasRelatedWork W2083321254 @default.
- W2056804519 hasRelatedWork W2089633568 @default.
- W2056804519 hasRelatedWork W2093981004 @default.
- W2056804519 hasRelatedWork W2129859591 @default.
- W2056804519 hasRelatedWork W2379688728 @default.
- W2056804519 hasRelatedWork W3144697431 @default.
- W2056804519 hasVolume "7" @default.
- W2056804519 isParatext "false" @default.
- W2056804519 isRetracted "false" @default.
- W2056804519 magId "2056804519" @default.
- W2056804519 workType "article" @default.