Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056923787> ?p ?o ?g. }
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- W2056923787 endingPage "160" @default.
- W2056923787 startingPage "155" @default.
- W2056923787 abstract "In this study, the use of novel, liquid, organic arsenic precursors as substitutes for the highly toxic hydride gas arsine (AsH3) in low pressure metalorganic vapor phase epitaxy (LP-MOVPE) of (GaIn)As lattice matched on InP has been investigated. The model precursors out of the classes of (alkyl)3-nAsHn (n = 0,1,2) are tertiarybutyl arsine (TBAs), ditertiarybutyl arsine (DitBAsH) and diethyltertiarybutyl arsine (DEtBAs). The MOVPE growth has been investigated in the temperature range of 570–650°C using VIII ratios from 2 to 20. The obtained epitaxial layer quality as examined by means of optical and scanning electron microscopy (SEM), high resolution double crystal X-ray diffraction, temperature-dependent van der Pauw-Hall, as well as photoluminescence (PL) measurements, will be compared for the different source molecules. Under optimized conditions almost uncompensated n-type (GaIn)As layers with carrier concentrations below 1 × 1015 cm−3 and corresponding mobilities above 80 000 cm2/V · s have been realized. For TBAs and DitBAsH in combination with the corresponding P sources TBP and DitBuPH, respectively, we have worked out a process parameter area for the growth of layers with device quality, as proven by the realization of a pin-detector structure." @default.
- W2056923787 created "2016-06-24" @default.
- W2056923787 creator A5011016184 @default.
- W2056923787 creator A5019941701 @default.
- W2056923787 creator A5026473850 @default.
- W2056923787 creator A5048030604 @default.
- W2056923787 creator A5056097202 @default.
- W2056923787 creator A5071629628 @default.
- W2056923787 creator A5089269003 @default.
- W2056923787 date "1997-01-01" @default.
- W2056923787 modified "2023-10-18" @default.
- W2056923787 title "Properties of (Ga0.47In0.53)As epitaxial layers grown by metalorganic vapor phase epitaxy (MOVPE) using alternative arsenic precursors" @default.
- W2056923787 cites W1748532996 @default.
- W2056923787 cites W1964820202 @default.
- W2056923787 cites W1967505987 @default.
- W2056923787 cites W1990190003 @default.
- W2056923787 cites W2021914544 @default.
- W2056923787 cites W2060855720 @default.
- W2056923787 cites W2072522063 @default.
- W2056923787 cites W2093197685 @default.
- W2056923787 cites W2114443321 @default.
- W2056923787 cites W2115887386 @default.
- W2056923787 cites W2119354660 @default.
- W2056923787 cites W2138066864 @default.
- W2056923787 doi "https://doi.org/10.1016/s0022-0248(96)00640-9" @default.
- W2056923787 hasPublicationYear "1997" @default.
- W2056923787 type Work @default.
- W2056923787 sameAs 2056923787 @default.
- W2056923787 citedByCount "7" @default.
- W2056923787 countsByYear W20569237872017 @default.
- W2056923787 crossrefType "journal-article" @default.
- W2056923787 hasAuthorship W2056923787A5011016184 @default.
- W2056923787 hasAuthorship W2056923787A5019941701 @default.
- W2056923787 hasAuthorship W2056923787A5026473850 @default.
- W2056923787 hasAuthorship W2056923787A5048030604 @default.
- W2056923787 hasAuthorship W2056923787A5056097202 @default.
- W2056923787 hasAuthorship W2056923787A5071629628 @default.
- W2056923787 hasAuthorship W2056923787A5089269003 @default.
- W2056923787 hasConcept C110738630 @default.
- W2056923787 hasConcept C113196181 @default.
- W2056923787 hasConcept C119599485 @default.
- W2056923787 hasConcept C127413603 @default.
- W2056923787 hasConcept C134112204 @default.
- W2056923787 hasConcept C161790260 @default.
- W2056923787 hasConcept C175665537 @default.
- W2056923787 hasConcept C178790620 @default.
- W2056923787 hasConcept C185592680 @default.
- W2056923787 hasConcept C192562407 @default.
- W2056923787 hasConcept C2776776902 @default.
- W2056923787 hasConcept C2777716191 @default.
- W2056923787 hasConcept C2779227376 @default.
- W2056923787 hasConcept C49040817 @default.
- W2056923787 hasConcept C502230775 @default.
- W2056923787 hasConcept C69990965 @default.
- W2056923787 hasConcept C85080765 @default.
- W2056923787 hasConcept C85443114 @default.
- W2056923787 hasConceptScore W2056923787C110738630 @default.
- W2056923787 hasConceptScore W2056923787C113196181 @default.
- W2056923787 hasConceptScore W2056923787C119599485 @default.
- W2056923787 hasConceptScore W2056923787C127413603 @default.
- W2056923787 hasConceptScore W2056923787C134112204 @default.
- W2056923787 hasConceptScore W2056923787C161790260 @default.
- W2056923787 hasConceptScore W2056923787C175665537 @default.
- W2056923787 hasConceptScore W2056923787C178790620 @default.
- W2056923787 hasConceptScore W2056923787C185592680 @default.
- W2056923787 hasConceptScore W2056923787C192562407 @default.
- W2056923787 hasConceptScore W2056923787C2776776902 @default.
- W2056923787 hasConceptScore W2056923787C2777716191 @default.
- W2056923787 hasConceptScore W2056923787C2779227376 @default.
- W2056923787 hasConceptScore W2056923787C49040817 @default.
- W2056923787 hasConceptScore W2056923787C502230775 @default.
- W2056923787 hasConceptScore W2056923787C69990965 @default.
- W2056923787 hasConceptScore W2056923787C85080765 @default.
- W2056923787 hasConceptScore W2056923787C85443114 @default.
- W2056923787 hasIssue "1-4" @default.
- W2056923787 hasLocation W20569237871 @default.
- W2056923787 hasOpenAccess W2056923787 @default.
- W2056923787 hasPrimaryLocation W20569237871 @default.
- W2056923787 hasRelatedWork W1980720307 @default.
- W2056923787 hasRelatedWork W1995814754 @default.
- W2056923787 hasRelatedWork W2001754626 @default.
- W2056923787 hasRelatedWork W2043067077 @default.
- W2056923787 hasRelatedWork W2056923787 @default.
- W2056923787 hasRelatedWork W2075021216 @default.
- W2056923787 hasRelatedWork W2117446672 @default.
- W2056923787 hasRelatedWork W2333553850 @default.
- W2056923787 hasRelatedWork W2513062241 @default.
- W2056923787 hasRelatedWork W2544198396 @default.
- W2056923787 hasVolume "170" @default.
- W2056923787 isParatext "false" @default.
- W2056923787 isRetracted "false" @default.
- W2056923787 magId "2056923787" @default.
- W2056923787 workType "article" @default.