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- W2057004013 abstract "Two-dimensional (2D) scanners can be used for displays, printers, optical data storage devices, optical scanning microscopes, and free-space optical interconnects. In this paper, we will describe the modeling and simulation of a novel cantilever microscanner. The scanner is actuated using electrostatic force. The cantilever beam connects to the top electrode. The bottom four electrodes on the substrate provide extra feedback for the control of the cantilever beam. A thorough mechanical analysis (both static and dynamic) using Finite Element Analysis has been performed. Key design parameters such as driving voltage, tilt angle and resonant frequencies have been investigated. The model has not been verified by experimental data but a fabrication process flow has been designed. The fabrication of this novel cantilever microscanner is in progress." @default.
- W2057004013 created "2016-06-24" @default.
- W2057004013 creator A5041312757 @default.
- W2057004013 creator A5050627323 @default.
- W2057004013 creator A5054982110 @default.
- W2057004013 creator A5055059104 @default.
- W2057004013 date "2002-06-06" @default.
- W2057004013 modified "2023-10-15" @default.
- W2057004013 title "Cantilever microscanners for free-space optical interconnects" @default.
- W2057004013 doi "https://doi.org/10.1117/12.469569" @default.
- W2057004013 hasPublicationYear "2002" @default.
- W2057004013 type Work @default.
- W2057004013 sameAs 2057004013 @default.
- W2057004013 citedByCount "2" @default.
- W2057004013 crossrefType "proceedings-article" @default.
- W2057004013 hasAuthorship W2057004013A5041312757 @default.
- W2057004013 hasAuthorship W2057004013A5050627323 @default.
- W2057004013 hasAuthorship W2057004013A5054982110 @default.
- W2057004013 hasAuthorship W2057004013A5055059104 @default.
- W2057004013 hasConcept C119599485 @default.
- W2057004013 hasConcept C120665830 @default.
- W2057004013 hasConcept C121332964 @default.
- W2057004013 hasConcept C127413603 @default.
- W2057004013 hasConcept C135628077 @default.
- W2057004013 hasConcept C136525101 @default.
- W2057004013 hasConcept C141354745 @default.
- W2057004013 hasConcept C142724271 @default.
- W2057004013 hasConcept C159985019 @default.
- W2057004013 hasConcept C165801399 @default.
- W2057004013 hasConcept C168834538 @default.
- W2057004013 hasConcept C17525397 @default.
- W2057004013 hasConcept C192562407 @default.
- W2057004013 hasConcept C204787440 @default.
- W2057004013 hasConcept C2779751349 @default.
- W2057004013 hasConcept C2779844322 @default.
- W2057004013 hasConcept C37977207 @default.
- W2057004013 hasConcept C49040817 @default.
- W2057004013 hasConcept C62520636 @default.
- W2057004013 hasConcept C66938386 @default.
- W2057004013 hasConcept C71924100 @default.
- W2057004013 hasConcept C78519656 @default.
- W2057004013 hasConceptScore W2057004013C119599485 @default.
- W2057004013 hasConceptScore W2057004013C120665830 @default.
- W2057004013 hasConceptScore W2057004013C121332964 @default.
- W2057004013 hasConceptScore W2057004013C127413603 @default.
- W2057004013 hasConceptScore W2057004013C135628077 @default.
- W2057004013 hasConceptScore W2057004013C136525101 @default.
- W2057004013 hasConceptScore W2057004013C141354745 @default.
- W2057004013 hasConceptScore W2057004013C142724271 @default.
- W2057004013 hasConceptScore W2057004013C159985019 @default.
- W2057004013 hasConceptScore W2057004013C165801399 @default.
- W2057004013 hasConceptScore W2057004013C168834538 @default.
- W2057004013 hasConceptScore W2057004013C17525397 @default.
- W2057004013 hasConceptScore W2057004013C192562407 @default.
- W2057004013 hasConceptScore W2057004013C204787440 @default.
- W2057004013 hasConceptScore W2057004013C2779751349 @default.
- W2057004013 hasConceptScore W2057004013C2779844322 @default.
- W2057004013 hasConceptScore W2057004013C37977207 @default.
- W2057004013 hasConceptScore W2057004013C49040817 @default.
- W2057004013 hasConceptScore W2057004013C62520636 @default.
- W2057004013 hasConceptScore W2057004013C66938386 @default.
- W2057004013 hasConceptScore W2057004013C71924100 @default.
- W2057004013 hasConceptScore W2057004013C78519656 @default.
- W2057004013 hasLocation W20570040131 @default.
- W2057004013 hasOpenAccess W2057004013 @default.
- W2057004013 hasPrimaryLocation W20570040131 @default.
- W2057004013 hasRelatedWork W1998901417 @default.
- W2057004013 hasRelatedWork W2035694440 @default.
- W2057004013 hasRelatedWork W2047472955 @default.
- W2057004013 hasRelatedWork W2071491909 @default.
- W2057004013 hasRelatedWork W2330581200 @default.
- W2057004013 hasRelatedWork W2662569605 @default.
- W2057004013 hasRelatedWork W2921747745 @default.
- W2057004013 hasRelatedWork W2924273856 @default.
- W2057004013 hasRelatedWork W3043362707 @default.
- W2057004013 hasRelatedWork W4235126770 @default.
- W2057004013 isParatext "false" @default.
- W2057004013 isRetracted "false" @default.
- W2057004013 magId "2057004013" @default.
- W2057004013 workType "article" @default.