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- W2057038439 abstract "Nanoimprint lithography is a powerful tool for making large area sub-wavelength scale optical devices with high-throughput fabrication. We developed a thermal nanoimprint lithography process for making sub-wavelength HCG patterns on an SOI substrate. A vertical etching profile and a smooth etched surface, which meet the requirements for Si based HCG structure, were obtained. We fabricated large area (1cm x 1cm) HCG with good uniformity in the entire sample. The clear angular dependence of the reflectivity of Si-HCG can be seen, which is in good agreement with the modeling result. The engineered angular dependence of HCG could be useful for the mode control of VCSELs and spatial mode multiplexers." @default.
- W2057038439 created "2016-06-24" @default.
- W2057038439 creator A5003637820 @default.
- W2057038439 creator A5013703136 @default.
- W2057038439 creator A5035060094 @default.
- W2057038439 creator A5055306734 @default.
- W2057038439 creator A5083125387 @default.
- W2057038439 date "2012-02-09" @default.
- W2057038439 modified "2023-09-25" @default.
- W2057038439 title "Fabrication and characterization of Si/SiO2 high contrast grating using nanoimprint lithography" @default.
- W2057038439 doi "https://doi.org/10.1117/12.910865" @default.
- W2057038439 hasPublicationYear "2012" @default.
- W2057038439 type Work @default.
- W2057038439 sameAs 2057038439 @default.
- W2057038439 citedByCount "2" @default.
- W2057038439 countsByYear W20570384392020 @default.
- W2057038439 crossrefType "proceedings-article" @default.
- W2057038439 hasAuthorship W2057038439A5003637820 @default.
- W2057038439 hasAuthorship W2057038439A5013703136 @default.
- W2057038439 hasAuthorship W2057038439A5035060094 @default.
- W2057038439 hasAuthorship W2057038439A5055306734 @default.
- W2057038439 hasAuthorship W2057038439A5083125387 @default.
- W2057038439 hasConcept C100460472 @default.
- W2057038439 hasConcept C105487726 @default.
- W2057038439 hasConcept C111368507 @default.
- W2057038439 hasConcept C120665830 @default.
- W2057038439 hasConcept C121332964 @default.
- W2057038439 hasConcept C126753812 @default.
- W2057038439 hasConcept C127313418 @default.
- W2057038439 hasConcept C136525101 @default.
- W2057038439 hasConcept C142724271 @default.
- W2057038439 hasConcept C162117346 @default.
- W2057038439 hasConcept C171250308 @default.
- W2057038439 hasConcept C192562407 @default.
- W2057038439 hasConcept C19275194 @default.
- W2057038439 hasConcept C204223013 @default.
- W2057038439 hasConcept C204787440 @default.
- W2057038439 hasConcept C2777046567 @default.
- W2057038439 hasConcept C2777289219 @default.
- W2057038439 hasConcept C2777813233 @default.
- W2057038439 hasConcept C2779227376 @default.
- W2057038439 hasConcept C41008148 @default.
- W2057038439 hasConcept C49040817 @default.
- W2057038439 hasConcept C6260449 @default.
- W2057038439 hasConcept C70970002 @default.
- W2057038439 hasConcept C71924100 @default.
- W2057038439 hasConcept C76155785 @default.
- W2057038439 hasConceptScore W2057038439C100460472 @default.
- W2057038439 hasConceptScore W2057038439C105487726 @default.
- W2057038439 hasConceptScore W2057038439C111368507 @default.
- W2057038439 hasConceptScore W2057038439C120665830 @default.
- W2057038439 hasConceptScore W2057038439C121332964 @default.
- W2057038439 hasConceptScore W2057038439C126753812 @default.
- W2057038439 hasConceptScore W2057038439C127313418 @default.
- W2057038439 hasConceptScore W2057038439C136525101 @default.
- W2057038439 hasConceptScore W2057038439C142724271 @default.
- W2057038439 hasConceptScore W2057038439C162117346 @default.
- W2057038439 hasConceptScore W2057038439C171250308 @default.
- W2057038439 hasConceptScore W2057038439C192562407 @default.
- W2057038439 hasConceptScore W2057038439C19275194 @default.
- W2057038439 hasConceptScore W2057038439C204223013 @default.
- W2057038439 hasConceptScore W2057038439C204787440 @default.
- W2057038439 hasConceptScore W2057038439C2777046567 @default.
- W2057038439 hasConceptScore W2057038439C2777289219 @default.
- W2057038439 hasConceptScore W2057038439C2777813233 @default.
- W2057038439 hasConceptScore W2057038439C2779227376 @default.
- W2057038439 hasConceptScore W2057038439C41008148 @default.
- W2057038439 hasConceptScore W2057038439C49040817 @default.
- W2057038439 hasConceptScore W2057038439C6260449 @default.
- W2057038439 hasConceptScore W2057038439C70970002 @default.
- W2057038439 hasConceptScore W2057038439C71924100 @default.
- W2057038439 hasConceptScore W2057038439C76155785 @default.
- W2057038439 hasLocation W20570384391 @default.
- W2057038439 hasOpenAccess W2057038439 @default.
- W2057038439 hasPrimaryLocation W20570384391 @default.
- W2057038439 hasRelatedWork W1817510052 @default.
- W2057038439 hasRelatedWork W1964017228 @default.
- W2057038439 hasRelatedWork W1976324500 @default.
- W2057038439 hasRelatedWork W1989267639 @default.
- W2057038439 hasRelatedWork W2021077848 @default.
- W2057038439 hasRelatedWork W2032034462 @default.
- W2057038439 hasRelatedWork W2081418489 @default.
- W2057038439 hasRelatedWork W2130624588 @default.
- W2057038439 hasRelatedWork W2293747973 @default.
- W2057038439 hasRelatedWork W2951581608 @default.
- W2057038439 isParatext "false" @default.
- W2057038439 isRetracted "false" @default.
- W2057038439 magId "2057038439" @default.
- W2057038439 workType "article" @default.