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- W2057078666 abstract "Porous silicon (PSi) is an attractive material for fabrication of multilayer optical devices such as Braggreflectors, Fabry-Perot resonators and other novel (optical) components. Such devices are characterized by aperiodic modulation of the refractive indices in alternating layers and can be classified as 1D photonic crystals. 2Dphotonic bandgap structures can be also obtained using a variation of applied potential on the back side of thesample during electrochemical formation of the multilayers. This technique allows a fabrication of spatiallydistributed filters on the millimeter size scale. In this paper, a new method is presented which uses a front sideprotective mask for the creation of 2D photonic bandgap structures on the micron scale. The devices obtained by thistechnique can be used for the creation of spatially distributed filters. The front side protective mask controls lateralundercut in multiple ways depending on the mask material. By varying the design and material of the protectivemask, PSi interference filters with desired optical parameters across a field of view can be realized.In this paper, a novel, simple method to produce 2D periodic multilayer structures is described. Inparticular, the focus is on the changes in the photonic crystal cavities when various mask materials are used. Inaddition, a new type of active optical components for a chip-to chip interconnection based on the combination of ourmethod and MEMS technology is presented." @default.
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- W2057078666 date "2007-02-08" @default.
- W2057078666 modified "2023-10-15" @default.
- W2057078666 title "Porous silicon 2D photonic crystals" @default.
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- W2057078666 doi "https://doi.org/10.1117/12.699127" @default.
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