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- W2057082791 abstract "We introduce a double source electron beam evaporation (DSEBET) technique in this paper. The refractive indexcoatings were fabricated on K9 glass substrate by adjusting the evaporation rates of two independent sources. Thecoatings, which were described by atomic force microscopy (AFM), show good compactness and homogeneity. Theantireflective (AR) coatings were fabricated on Superluminescent Diodes (SLD) by DSEBET. The hybrid AR coatingson the facets of SLD were prepared in evaporation rates of 0.22nm/s and 0.75nm/s for silicon and silicon dioxide,respectively. The results of AFM and spectral performance of coated SLD show that DSEBET has a promising future inpreparing the coatings on optoelectronic devices." @default.
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- W2057082791 date "2008-02-29" @default.
- W2057082791 modified "2023-09-26" @default.
- W2057082791 title "Study of Si/SiO 2 hybrid antireflective coatings on SLD prepared by DSEBET" @default.
- W2057082791 doi "https://doi.org/10.1117/12.792269" @default.
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