Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057114886> ?p ?o ?g. }
- W2057114886 endingPage "1387" @default.
- W2057114886 startingPage "1361" @default.
- W2057114886 abstract "The techniques of photolithography, electron lithography, X-ray lithography, ion bombardment etching, and liftoff are reviewed, and their advantages and disadvantages assessed from the point of view of fabricating surface-acoustic-wave and thin-film optical devices." @default.
- W2057114886 created "2016-06-24" @default.
- W2057114886 creator A5047618239 @default.
- W2057114886 date "1974-01-01" @default.
- W2057114886 modified "2023-09-26" @default.
- W2057114886 title "Fabrication techniques for surface-acoustic-wave and thin-film optical devices" @default.
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