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- W2057116472 abstract "This paper deals with the material quality of the SOI layers obtained through laser seeded ZMR. A numerical calculation and an experimental study have been performed to evaluate the merits of dashed seed lines and thick capping layers. As a result, defects are rejected at 100 μm from the seed, and the SOI layer thickness variations are reduced to ±200 Å." @default.
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- W2057116472 date "1989-01-01" @default.
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- W2057116472 title "Study of dashed seed lines and capping layers for laser seeded zone melting recrystallization" @default.
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- W2057116472 doi "https://doi.org/10.1016/0169-4332(89)90958-6" @default.
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