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- W2057131106 abstract "Submicron droplets of methyldichlorosilane (MDS) were generated by the evaporation/condensation method in a cryo-cooled aerosol flow apparatus and reacted with ammonia gas. A white powder consisting of high molecular weight solid silazane derivatives and ammonium chloride was instantaneously formed. Calcination of the amorphous silazanes yielded spherical particles of α - and ß -Si 3 N 4 , as determined by electron microscopy and X-ray diffraction analysis." @default.
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- W2057131106 date "1991-01-01" @default.
- W2057131106 modified "2023-09-24" @default.
- W2057131106 title "Synthesis of a silazane polymer by chemical reaction in an aerosol: a precursor for silicon nitride" @default.
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- W2057131106 doi "https://doi.org/10.1016/0021-8502(91)90081-r" @default.
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