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- W2057229722 abstract "Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Martin Peckerar, David Sander, Ankur Srivastava, Adakou Foli, Uzi Vishkin; Electron beam and optical proximity effect reduction for nanolithography: New results. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1 November 2007; 25 (6): 2288–2294. https://doi.org/10.1116/1.2806967 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology B Search Advanced Search |Citation Search" @default.
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- W2057229722 title "Electron beam and optical proximity effect reduction for nanolithography: New results" @default.
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