FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057236827> ?p ?o ?g. }

• W2057236827 endingPage "552" @default.
• W2057236827 startingPage "548" @default.
• W2057236827 abstract "Deep etching of n-type 6H-SiC using a two-step etching process has been studied. First, anodization of 6H-SiC in an HF electrolyte (2 wt.%) without ultraviolet light is applied to form a deep porous layer with the desired dimensions. Then, a thermal oxidation process is used to oxidize this porous layer. The oxidized layer is then removed in a concentrated HF solution. In the experiments, the etching parameters electrolyte concentration and current density are optimized in order to obtain a uniform pore size and hence, a smooth etched surface. After adjusting these parameters, the porous layer formation experiments are carried out at 20/spl deg/C in a 2 wt.% HF electrolyte using a current density of 50 mA/cm/sup 2/. The corresponding porous layer formation rate is about 1.1 /spl mu/m/min. To demonstrate the capabilities of this SiC bulk micromachining process, deep circular cavities are fabricated in n-type 6H-SiC substrates." @default.
• W2057236827 created "2016-06-24" @default.
• W2057236827 creator A5040769251 @default.
• W2057236827 creator A5041158477 @default.
• W2057236827 creator A5042845341 @default.
• W2057236827 creator A5079459369 @default.
• W2057236827 date "2006-06-01" @default.
• W2057236827 modified "2023-10-01" @default.
• W2057236827 title "Electrochemical Etching of n-Type 6H-SiC Without UV Illumination" @default.
• W2057236827 cites W133337056 @default.
• W2057236827 cites W1516662271 @default.
• W2057236827 cites W1547727273 @default.
• W2057236827 cites W1972091828 @default.
• W2057236827 cites W1989732897 @default.
• W2057236827 cites W2018019678 @default.
• W2057236827 cites W2023121818 @default.
• W2057236827 cites W2045284345 @default.
• W2057236827 cites W2055128875 @default.
• W2057236827 cites W2055132213 @default.
• W2057236827 cites W2063124155 @default.
• W2057236827 cites W2064377540 @default.
• W2057236827 cites W2078781479 @default.
• W2057236827 cites W2153438871 @default.
• W2057236827 doi "https://doi.org/10.1109/jmems.2006.872225" @default.
• W2057236827 hasPublicationYear "2006" @default.
• W2057236827 type Work @default.
• W2057236827 sameAs 2057236827 @default.
• W2057236827 citedByCount "10" @default.
• W2057236827 countsByYear W20572368272014 @default.
• W2057236827 countsByYear W20572368272016 @default.
• W2057236827 countsByYear W20572368272019 @default.
• W2057236827 countsByYear W20572368272021 @default.
• W2057236827 countsByYear W20572368272022 @default.
• W2057236827 crossrefType "journal-article" @default.
• W2057236827 hasAuthorship W2057236827A5040769251 @default.
• W2057236827 hasAuthorship W2057236827A5041158477 @default.
• W2057236827 hasAuthorship W2057236827A5042845341 @default.
• W2057236827 hasAuthorship W2057236827A5079459369 @default.
• W2057236827 hasConcept C100460472 @default.
• W2057236827 hasConcept C113196181 @default.
• W2057236827 hasConcept C121332964 @default.
• W2057236827 hasConcept C127413603 @default.
• W2057236827 hasConcept C147789679 @default.
• W2057236827 hasConcept C159985019 @default.
• W2057236827 hasConcept C17525397 @default.
• W2057236827 hasConcept C185592680 @default.
• W2057236827 hasConcept C192562407 @default.
• W2057236827 hasConcept C207740977 @default.
• W2057236827 hasConcept C22016385 @default.
• W2057236827 hasConcept C2776798109 @default.
• W2057236827 hasConcept C2779227376 @default.
• W2057236827 hasConcept C2779281663 @default.
• W2057236827 hasConcept C42360764 @default.
• W2057236827 hasConcept C43617362 @default.
• W2057236827 hasConcept C49040817 @default.
• W2057236827 hasConcept C513153333 @default.
• W2057236827 hasConcept C52859227 @default.
• W2057236827 hasConcept C62520636 @default.
• W2057236827 hasConcept C6648577 @default.
• W2057236827 hasConcept C68801617 @default.
• W2057236827 hasConceptScore W2057236827C100460472 @default.
• W2057236827 hasConceptScore W2057236827C113196181 @default.
• W2057236827 hasConceptScore W2057236827C121332964 @default.
• W2057236827 hasConceptScore W2057236827C127413603 @default.
• W2057236827 hasConceptScore W2057236827C147789679 @default.
• W2057236827 hasConceptScore W2057236827C159985019 @default.
• W2057236827 hasConceptScore W2057236827C17525397 @default.
• W2057236827 hasConceptScore W2057236827C185592680 @default.
• W2057236827 hasConceptScore W2057236827C192562407 @default.
• W2057236827 hasConceptScore W2057236827C207740977 @default.
• W2057236827 hasConceptScore W2057236827C22016385 @default.
• W2057236827 hasConceptScore W2057236827C2776798109 @default.
• W2057236827 hasConceptScore W2057236827C2779227376 @default.
• W2057236827 hasConceptScore W2057236827C2779281663 @default.
• W2057236827 hasConceptScore W2057236827C42360764 @default.
• W2057236827 hasConceptScore W2057236827C43617362 @default.
• W2057236827 hasConceptScore W2057236827C49040817 @default.
• W2057236827 hasConceptScore W2057236827C513153333 @default.
• W2057236827 hasConceptScore W2057236827C52859227 @default.
• W2057236827 hasConceptScore W2057236827C62520636 @default.
• W2057236827 hasConceptScore W2057236827C6648577 @default.
• W2057236827 hasConceptScore W2057236827C68801617 @default.
• W2057236827 hasIssue "3" @default.
• W2057236827 hasLocation W20572368271 @default.
• W2057236827 hasOpenAccess W2057236827 @default.
• W2057236827 hasPrimaryLocation W20572368271 @default.
• W2057236827 hasRelatedWork W1967496906 @default.
• W2057236827 hasRelatedWork W2039083369 @default.
• W2057236827 hasRelatedWork W2057236827 @default.
• W2057236827 hasRelatedWork W2122415841 @default.
• W2057236827 hasRelatedWork W2189291724 @default.
• W2057236827 hasRelatedWork W2350659312 @default.
• W2057236827 hasRelatedWork W2368293958 @default.
• W2057236827 hasRelatedWork W2385291844 @default.
• W2057236827 hasRelatedWork W2507824533 @default.
• W2057236827 hasRelatedWork W2587277867 @default.
• W2057236827 hasVolume "15" @default.
• W2057236827 isParatext "false" @default.

• next