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- W2057345317 abstract "Abstract The design of a comprehensive process evaluation vehicle for thorough evaluation of a small geometry CMOS process has been discussed in this paper. The process evaluation vehicle includes both parametric and functional test structures and is considered to be particularly useful for the development of a small geometry CMOS process." @default.
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- W2057345317 date "1984-01-01" @default.
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- W2057345317 title "Design of a comprehensive process evaluation vehicle for development of small geometry CMOS process" @default.
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- W2057345317 doi "https://doi.org/10.1016/0026-2714(84)90018-0" @default.
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