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• W2057384503 abstract "Aluminum diffusion into silicon nitride films at temperatures in the range 450–530°C was studied by Auger electron spectroscopy in conjunction with depth profiling. The activation energy for the diffusion of aluminum and the diffusion coefficient were found to be 2.0±0.3 eV and (7.3±3.5) x 10-3 cm2 s-1, respectively. The chemical effects in the KLL aluminum Auger spectra together with the compositional depth profiles suggest that the migration of aluminum is dominated by volume diffusion which involves the reaction of aluminum with oxygen." @default.
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• W2057384503 date "1978-02-01" @default.
• W2057384503 modified "2023-09-23" @default.
• W2057384503 title "Diffusion of aluminum into silicon nitride films" @default.
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• W2057384503 doi "https://doi.org/10.1016/0040-6090(78)90012-3" @default.
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