Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057450109> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2057450109 endingPage "L258" @default.
- W2057450109 startingPage "L257" @default.
- W2057450109 abstract "Conventionally, CoSi2 is considered to be a better choice than TiSi2 for integrated circuit fabrication due to its lower resisitivity and better thermal stability. In this letter we compare for the first time the stress reliability of metal–oxide–semiconductor (MOS) devices with CoSi2 and TiSi2 as gate electrode materials. We found that the use of TiSi2 as a gate electrode material can provide a better stress resistance than CoSi2, when negatively-biased constant current stress and constant voltage stress are applied." @default.
- W2057450109 created "2016-06-24" @default.
- W2057450109 creator A5007483925 @default.
- W2057450109 creator A5067964544 @default.
- W2057450109 date "2006-02-24" @default.
- W2057450109 modified "2023-09-25" @default.
- W2057450109 title "Stress Reliability Comparison of Metal-Oxide-Semiconductor Devices with CoSi2and TiSi2Gate Electrode Materials" @default.
- W2057450109 cites W1555969351 @default.
- W2057450109 doi "https://doi.org/10.1143/jjap.45.l257" @default.
- W2057450109 hasPublicationYear "2006" @default.
- W2057450109 type Work @default.
- W2057450109 sameAs 2057450109 @default.
- W2057450109 citedByCount "0" @default.
- W2057450109 crossrefType "journal-article" @default.
- W2057450109 hasAuthorship W2057450109A5007483925 @default.
- W2057450109 hasAuthorship W2057450109A5067964544 @default.
- W2057450109 hasConcept C108225325 @default.
- W2057450109 hasConcept C121332964 @default.
- W2057450109 hasConcept C138885662 @default.
- W2057450109 hasConcept C147789679 @default.
- W2057450109 hasConcept C159985019 @default.
- W2057450109 hasConcept C163258240 @default.
- W2057450109 hasConcept C17525397 @default.
- W2057450109 hasConcept C185592680 @default.
- W2057450109 hasConcept C191897082 @default.
- W2057450109 hasConcept C192562407 @default.
- W2057450109 hasConcept C21036866 @default.
- W2057450109 hasConcept C2779227376 @default.
- W2057450109 hasConcept C2779851234 @default.
- W2057450109 hasConcept C41895202 @default.
- W2057450109 hasConcept C43214815 @default.
- W2057450109 hasConcept C49040817 @default.
- W2057450109 hasConcept C544153396 @default.
- W2057450109 hasConcept C62520636 @default.
- W2057450109 hasConcept C79635011 @default.
- W2057450109 hasConceptScore W2057450109C108225325 @default.
- W2057450109 hasConceptScore W2057450109C121332964 @default.
- W2057450109 hasConceptScore W2057450109C138885662 @default.
- W2057450109 hasConceptScore W2057450109C147789679 @default.
- W2057450109 hasConceptScore W2057450109C159985019 @default.
- W2057450109 hasConceptScore W2057450109C163258240 @default.
- W2057450109 hasConceptScore W2057450109C17525397 @default.
- W2057450109 hasConceptScore W2057450109C185592680 @default.
- W2057450109 hasConceptScore W2057450109C191897082 @default.
- W2057450109 hasConceptScore W2057450109C192562407 @default.
- W2057450109 hasConceptScore W2057450109C21036866 @default.
- W2057450109 hasConceptScore W2057450109C2779227376 @default.
- W2057450109 hasConceptScore W2057450109C2779851234 @default.
- W2057450109 hasConceptScore W2057450109C41895202 @default.
- W2057450109 hasConceptScore W2057450109C43214815 @default.
- W2057450109 hasConceptScore W2057450109C49040817 @default.
- W2057450109 hasConceptScore W2057450109C544153396 @default.
- W2057450109 hasConceptScore W2057450109C62520636 @default.
- W2057450109 hasConceptScore W2057450109C79635011 @default.
- W2057450109 hasIssue "No. 9" @default.
- W2057450109 hasLocation W20574501091 @default.
- W2057450109 hasOpenAccess W2057450109 @default.
- W2057450109 hasPrimaryLocation W20574501091 @default.
- W2057450109 hasRelatedWork W1753505821 @default.
- W2057450109 hasRelatedWork W2073828176 @default.
- W2057450109 hasRelatedWork W2080584289 @default.
- W2057450109 hasRelatedWork W2165641721 @default.
- W2057450109 hasRelatedWork W249284594 @default.
- W2057450109 hasRelatedWork W2599902604 @default.
- W2057450109 hasRelatedWork W2620331613 @default.
- W2057450109 hasRelatedWork W2925336774 @default.
- W2057450109 hasRelatedWork W2979873806 @default.
- W2057450109 hasRelatedWork W3105417689 @default.
- W2057450109 hasVolume "45" @default.
- W2057450109 isParatext "false" @default.
- W2057450109 isRetracted "false" @default.
- W2057450109 magId "2057450109" @default.
- W2057450109 workType "article" @default.