Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057467315> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2057467315 endingPage "L2326" @default.
- W2057467315 startingPage "L2326" @default.
- W2057467315 abstract "The effects of preamorphization by As + implantation for the shallow p + -n junction formation have been investigated in this study. The retarded diffusion effect of boron atoms due to the electric field produced by arsenic profile was observed during annealing. The shallow p + -n junction with low leakage was obtained by optimizing the thickness of the preamorphized layer." @default.
- W2057467315 created "2016-06-24" @default.
- W2057467315 creator A5030924300 @default.
- W2057467315 creator A5049986651 @default.
- W2057467315 creator A5061807492 @default.
- W2057467315 date "1990-12-01" @default.
- W2057467315 modified "2023-09-27" @default.
- W2057467315 title "As<sup>+</sup>-Preamorphization Method for Shallow p<sup>+</sup>-n Junction Formation" @default.
- W2057467315 cites W1968483754 @default.
- W2057467315 cites W2000544745 @default.
- W2057467315 cites W2032325832 @default.
- W2057467315 cites W2032327944 @default.
- W2057467315 doi "https://doi.org/10.1143/jjap.29.l2326" @default.
- W2057467315 hasPublicationYear "1990" @default.
- W2057467315 type Work @default.
- W2057467315 sameAs 2057467315 @default.
- W2057467315 citedByCount "6" @default.
- W2057467315 crossrefType "journal-article" @default.
- W2057467315 hasAuthorship W2057467315A5030924300 @default.
- W2057467315 hasAuthorship W2057467315A5049986651 @default.
- W2057467315 hasAuthorship W2057467315A5061807492 @default.
- W2057467315 hasConcept C108225325 @default.
- W2057467315 hasConcept C113196181 @default.
- W2057467315 hasConcept C121332964 @default.
- W2057467315 hasConcept C145148216 @default.
- W2057467315 hasConcept C178790620 @default.
- W2057467315 hasConcept C185592680 @default.
- W2057467315 hasConcept C191897082 @default.
- W2057467315 hasConcept C192562407 @default.
- W2057467315 hasConcept C26873012 @default.
- W2057467315 hasConcept C2777855556 @default.
- W2057467315 hasConcept C2779889077 @default.
- W2057467315 hasConcept C41823505 @default.
- W2057467315 hasConcept C43617362 @default.
- W2057467315 hasConcept C49040817 @default.
- W2057467315 hasConcept C501308230 @default.
- W2057467315 hasConcept C502230775 @default.
- W2057467315 hasConcept C544956773 @default.
- W2057467315 hasConcept C60799052 @default.
- W2057467315 hasConcept C62520636 @default.
- W2057467315 hasConcept C62628764 @default.
- W2057467315 hasConceptScore W2057467315C108225325 @default.
- W2057467315 hasConceptScore W2057467315C113196181 @default.
- W2057467315 hasConceptScore W2057467315C121332964 @default.
- W2057467315 hasConceptScore W2057467315C145148216 @default.
- W2057467315 hasConceptScore W2057467315C178790620 @default.
- W2057467315 hasConceptScore W2057467315C185592680 @default.
- W2057467315 hasConceptScore W2057467315C191897082 @default.
- W2057467315 hasConceptScore W2057467315C192562407 @default.
- W2057467315 hasConceptScore W2057467315C26873012 @default.
- W2057467315 hasConceptScore W2057467315C2777855556 @default.
- W2057467315 hasConceptScore W2057467315C2779889077 @default.
- W2057467315 hasConceptScore W2057467315C41823505 @default.
- W2057467315 hasConceptScore W2057467315C43617362 @default.
- W2057467315 hasConceptScore W2057467315C49040817 @default.
- W2057467315 hasConceptScore W2057467315C501308230 @default.
- W2057467315 hasConceptScore W2057467315C502230775 @default.
- W2057467315 hasConceptScore W2057467315C544956773 @default.
- W2057467315 hasConceptScore W2057467315C60799052 @default.
- W2057467315 hasConceptScore W2057467315C62520636 @default.
- W2057467315 hasConceptScore W2057467315C62628764 @default.
- W2057467315 hasIssue "12A" @default.
- W2057467315 hasLocation W20574673151 @default.
- W2057467315 hasOpenAccess W2057467315 @default.
- W2057467315 hasPrimaryLocation W20574673151 @default.
- W2057467315 hasRelatedWork W1976261375 @default.
- W2057467315 hasRelatedWork W1997428111 @default.
- W2057467315 hasRelatedWork W2042925312 @default.
- W2057467315 hasRelatedWork W2048269824 @default.
- W2057467315 hasRelatedWork W2054572570 @default.
- W2057467315 hasRelatedWork W2065669148 @default.
- W2057467315 hasRelatedWork W2078509465 @default.
- W2057467315 hasRelatedWork W2275386326 @default.
- W2057467315 hasRelatedWork W2328528196 @default.
- W2057467315 hasRelatedWork W234451777 @default.
- W2057467315 hasVolume "29" @default.
- W2057467315 isParatext "false" @default.
- W2057467315 isRetracted "false" @default.
- W2057467315 magId "2057467315" @default.
- W2057467315 workType "article" @default.