Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057520005> ?p ?o ?g. }
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- W2057520005 endingPage "802" @default.
- W2057520005 startingPage "793" @default.
- W2057520005 abstract "The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and lower costs, which will require the development of a new generation of manufacturing tools to increase yield productivity, spearheaded by improved measurement devices and advanced process control. The objectives of this paper are to review of the challenges in applying two areas of expertise in process systems engineering (PSE), namely process monitoring and control, and to motivate more academics working in PSE to get actively involved. PSE solutions appropriate for these challenges involve harnessing multivariate statistics, automated modeling approaches like genetic programming, and multivariable model-based control. The paper is illustrated with several example applications, all tested in fabrication facilities in Israel." @default.
- W2057520005 created "2016-06-24" @default.
- W2057520005 creator A5034545668 @default.
- W2057520005 creator A5068592522 @default.
- W2057520005 creator A5079461539 @default.
- W2057520005 date "2007-07-01" @default.
- W2057520005 modified "2023-09-24" @default.
- W2057520005 title "The role of process system engineering (PSE) in integrated circuit (IC) manufacturing" @default.
- W2057520005 cites W1816596316 @default.
- W2057520005 cites W1971092784 @default.
- W2057520005 cites W2019628046 @default.
- W2057520005 cites W2029462554 @default.
- W2057520005 cites W2082905570 @default.
- W2057520005 cites W2095518865 @default.
- W2057520005 cites W2099979739 @default.
- W2057520005 cites W2100851179 @default.
- W2057520005 cites W2102262904 @default.
- W2057520005 cites W2111120324 @default.
- W2057520005 cites W2118722226 @default.
- W2057520005 cites W2156342602 @default.
- W2057520005 cites W2163114907 @default.
- W2057520005 cites W2164174536 @default.
- W2057520005 cites W2618107020 @default.
- W2057520005 cites W2619623634 @default.
- W2057520005 doi "https://doi.org/10.1016/j.conengprac.2006.04.003" @default.
- W2057520005 hasPublicationYear "2007" @default.
- W2057520005 type Work @default.
- W2057520005 sameAs 2057520005 @default.
- W2057520005 citedByCount "9" @default.
- W2057520005 countsByYear W20575200052012 @default.
- W2057520005 countsByYear W20575200052021 @default.
- W2057520005 crossrefType "journal-article" @default.
- W2057520005 hasAuthorship W2057520005A5034545668 @default.
- W2057520005 hasAuthorship W2057520005A5068592522 @default.
- W2057520005 hasAuthorship W2057520005A5079461539 @default.
- W2057520005 hasConcept C111919701 @default.
- W2057520005 hasConcept C117671659 @default.
- W2057520005 hasConcept C119599485 @default.
- W2057520005 hasConcept C127413603 @default.
- W2057520005 hasConcept C201995342 @default.
- W2057520005 hasConcept C21880701 @default.
- W2057520005 hasConcept C2994520618 @default.
- W2057520005 hasConcept C41008148 @default.
- W2057520005 hasConcept C530198007 @default.
- W2057520005 hasConcept C98045186 @default.
- W2057520005 hasConceptScore W2057520005C111919701 @default.
- W2057520005 hasConceptScore W2057520005C117671659 @default.
- W2057520005 hasConceptScore W2057520005C119599485 @default.
- W2057520005 hasConceptScore W2057520005C127413603 @default.
- W2057520005 hasConceptScore W2057520005C201995342 @default.
- W2057520005 hasConceptScore W2057520005C21880701 @default.
- W2057520005 hasConceptScore W2057520005C2994520618 @default.
- W2057520005 hasConceptScore W2057520005C41008148 @default.
- W2057520005 hasConceptScore W2057520005C530198007 @default.
- W2057520005 hasConceptScore W2057520005C98045186 @default.
- W2057520005 hasIssue "7" @default.
- W2057520005 hasLocation W20575200051 @default.
- W2057520005 hasOpenAccess W2057520005 @default.
- W2057520005 hasPrimaryLocation W20575200051 @default.
- W2057520005 hasRelatedWork W1457512362 @default.
- W2057520005 hasRelatedWork W1986542084 @default.
- W2057520005 hasRelatedWork W2320239699 @default.
- W2057520005 hasRelatedWork W2328032361 @default.
- W2057520005 hasRelatedWork W2350180741 @default.
- W2057520005 hasRelatedWork W2370433204 @default.
- W2057520005 hasRelatedWork W2392573986 @default.
- W2057520005 hasRelatedWork W2516387086 @default.
- W2057520005 hasRelatedWork W2767804580 @default.
- W2057520005 hasRelatedWork W2888048300 @default.
- W2057520005 hasVolume "15" @default.
- W2057520005 isParatext "false" @default.
- W2057520005 isRetracted "false" @default.
- W2057520005 magId "2057520005" @default.
- W2057520005 workType "article" @default.