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- W2057639126 abstract "In this paper I present some techniques by which MEMS structures with sub-wavelength resolution can be obtained when using laser lithography. I concentrate on two major techniques: single photon and multi-photon absorption processes." @default.
- W2057639126 created "2016-06-24" @default.
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- W2057639126 date "2008-03-03" @default.
- W2057639126 modified "2023-09-23" @default.
- W2057639126 title "<title>Sub-wavelength resolution laser lithography in the field of MEMS</title>" @default.
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- W2057639126 doi "https://doi.org/10.1117/12.801971" @default.
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