FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057647552> ?p ?o ?g. }

• W2057647552 abstract "We have developed a new oxygen radical source based on the reactive sputtering phenomena of a titanium target for high rate deposition of TiO2 films. In this oxygen radical source, oxygen radicals are mainly produced by two mechanisms: selective sputter-emission of oxygen atoms from the target surface covered with a titanium oxide layer, and production of high-density oxygen plasma in the space near the magnetron-sputtering cathode. Compared with molecular oxygen ions, the amount of atomic oxygen radicals increased significantly with an increase in discharge current so that atomic oxygen radicals were mainly produced by this radical source. It should be noted that oxygen atoms were selectively sputtered from the target surface, and titanium atoms sputter-emitted from the target cathode were negligibly small. The amount of oxygen radicals supplied from this radical source increased linearly with increasing discharge current, and oxygen radicals of 1 × 1015 atoms/s/cm2 were supplied to the substrate surface at a discharge current of 1.2 A. We conclude that our newly developed oxygen radical source can be a good tool to achieve high rate deposition and to control the structure of TiO2 films for many industrial design applications." @default.
• W2057647552 created "2016-06-24" @default.
• W2057647552 creator A5008847308 @default.
• W2057647552 creator A5037595390 @default.
• W2057647552 creator A5069403451 @default.
• W2057647552 date "2012-09-04" @default.
• W2057647552 modified "2023-09-26" @default.
• W2057647552 title "New oxygen radical source using selective sputtering of oxygen atoms for high rate deposition of TiO2 films" @default.
• W2057647552 cites W1524685838 @default.
• W2057647552 cites W1675460008 @default.
• W2057647552 cites W1970033497 @default.
• W2057647552 cites W1987436174 @default.
• W2057647552 cites W1992966770 @default.
• W2057647552 cites W1998897905 @default.
• W2057647552 cites W2004145836 @default.
• W2057647552 cites W2006584658 @default.
• W2057647552 cites W2006850329 @default.
• W2057647552 cites W2009246450 @default.
• W2057647552 cites W2026222257 @default.
• W2057647552 cites W2030265458 @default.
• W2057647552 cites W2041534677 @default.
• W2057647552 cites W2051450479 @default.
• W2057647552 cites W2071623254 @default.
• W2057647552 cites W2072208006 @default.
• W2057647552 cites W2079523124 @default.
• W2057647552 cites W2080066879 @default.
• W2057647552 cites W2086739686 @default.
• W2057647552 cites W2093118770 @default.
• W2057647552 cites W2145274462 @default.
• W2057647552 cites W2154271793 @default.
• W2057647552 cites W2171852470 @default.
• W2057647552 doi "https://doi.org/10.1116/1.4748803" @default.
• W2057647552 hasPublicationYear "2012" @default.
• W2057647552 type Work @default.
• W2057647552 sameAs 2057647552 @default.
• W2057647552 citedByCount "2" @default.
• W2057647552 countsByYear W20576475522015 @default.
• W2057647552 countsByYear W20576475522022 @default.
• W2057647552 crossrefType "journal-article" @default.
• W2057647552 hasAuthorship W2057647552A5008847308 @default.
• W2057647552 hasAuthorship W2057647552A5037595390 @default.
• W2057647552 hasAuthorship W2057647552A5069403451 @default.
• W2057647552 hasConcept C107872376 @default.
• W2057647552 hasConcept C111368507 @default.
• W2057647552 hasConcept C113196181 @default.
• W2057647552 hasConcept C127313418 @default.
• W2057647552 hasConcept C139066938 @default.
• W2057647552 hasConcept C147789679 @default.
• W2057647552 hasConcept C151730666 @default.
• W2057647552 hasConcept C166524527 @default.
• W2057647552 hasConcept C171250308 @default.
• W2057647552 hasConcept C178790620 @default.
• W2057647552 hasConcept C179104552 @default.
• W2057647552 hasConcept C185592680 @default.
• W2057647552 hasConcept C19067145 @default.
• W2057647552 hasConcept C192562407 @default.
• W2057647552 hasConcept C22423302 @default.
• W2057647552 hasConcept C2777289219 @default.
• W2057647552 hasConcept C2816523 @default.
• W2057647552 hasConcept C49110097 @default.
• W2057647552 hasConcept C506065880 @default.
• W2057647552 hasConcept C540031477 @default.
• W2057647552 hasConcept C61427134 @default.
• W2057647552 hasConcept C64297162 @default.
• W2057647552 hasConcept C75473681 @default.
• W2057647552 hasConcept C86803240 @default.
• W2057647552 hasConcept C89169090 @default.
• W2057647552 hasConceptScore W2057647552C107872376 @default.
• W2057647552 hasConceptScore W2057647552C111368507 @default.
• W2057647552 hasConceptScore W2057647552C113196181 @default.
• W2057647552 hasConceptScore W2057647552C127313418 @default.
• W2057647552 hasConceptScore W2057647552C139066938 @default.
• W2057647552 hasConceptScore W2057647552C147789679 @default.
• W2057647552 hasConceptScore W2057647552C151730666 @default.
• W2057647552 hasConceptScore W2057647552C166524527 @default.
• W2057647552 hasConceptScore W2057647552C171250308 @default.
• W2057647552 hasConceptScore W2057647552C178790620 @default.
• W2057647552 hasConceptScore W2057647552C179104552 @default.
• W2057647552 hasConceptScore W2057647552C185592680 @default.
• W2057647552 hasConceptScore W2057647552C19067145 @default.
• W2057647552 hasConceptScore W2057647552C192562407 @default.
• W2057647552 hasConceptScore W2057647552C22423302 @default.
• W2057647552 hasConceptScore W2057647552C2777289219 @default.
• W2057647552 hasConceptScore W2057647552C2816523 @default.
• W2057647552 hasConceptScore W2057647552C49110097 @default.
• W2057647552 hasConceptScore W2057647552C506065880 @default.
• W2057647552 hasConceptScore W2057647552C540031477 @default.
• W2057647552 hasConceptScore W2057647552C61427134 @default.
• W2057647552 hasConceptScore W2057647552C64297162 @default.
• W2057647552 hasConceptScore W2057647552C75473681 @default.
• W2057647552 hasConceptScore W2057647552C86803240 @default.
• W2057647552 hasConceptScore W2057647552C89169090 @default.
• W2057647552 hasIssue "6" @default.
• W2057647552 hasLocation W20576475521 @default.
• W2057647552 hasOpenAccess W2057647552 @default.
• W2057647552 hasPrimaryLocation W20576475521 @default.
• W2057647552 hasRelatedWork W1983879802 @default.
• W2057647552 hasRelatedWork W2015401539 @default.
• W2057647552 hasRelatedWork W2031404878 @default.
• W2057647552 hasRelatedWork W2048201894 @default.

• next