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- W2057657645 abstract "We constructed a beam line, BL-17C, for X-ray lithography at the Photon Factory. In this beam line, two parallel mirrors are used to cutoff high-energy photons and to keep the light path of the reflected beam unchanged when the glancing angle of the mirrors changes. We studied the reflective characteristics of mirrors using He gas scattering to measure reflected and incident light spectra. The obtained reflectivity for a fused quartz mirror with a roughness of 0.3 nm nearly equaled the theoretical value." @default.
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- W2057657645 date "1990-05-01" @default.
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- W2057657645 title "X-ray lithography beam line BL-17C at the photon factory" @default.
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- W2057657645 doi "https://doi.org/10.1016/0168-9002(90)90055-b" @default.
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