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• W2057677696 abstract "We have newly invented a micromechanism for precise position control, which is equivalent to that of an electrical digital-to-analog converter(DAC) of the R-2R resistor network. The micromechanical C-2C compliance suspension network has been fabricated on a silicon-on-insulator wafer by a micromachining technique. When N -bit digital driving voltages are applied to the micromechanism, cascaded electrostatic microactuators produce a set of displacements of ±1 µm. These displacements accumulate in the suspension network with binary weights to synthesize DAC-like displacement output. A traveling displacement of 6 µm is obtained while the positioning resolution is 0.38 µm in the case of 4 bit input. Resolution can be improved further by increasing the addressing size of the input." @default.
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• W2057677696 date "1999-05-01" @default.
• W2057677696 modified "2023-10-18" @default.
• W2057677696 title "A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism" @default.
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• W2057677696 doi "https://doi.org/10.1143/jjap.38.l593" @default.
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