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• W2057693531 endingPage "47" @default.
• W2057693531 startingPage "42" @default.
• W2057693531 abstract "High-power pulsed dc magnetron discharges for ionized high-rate sputtering of metallic films were systematically investigated. The depositions were performed using two unbalanced circular magnetrons of different types with a directly water-cooled planar copper target of 100mm in diameter. The repetition frequency was 1kHz at a fixed 20% duty cycle and an argon pressure of 0.5Pa. Time evolutions of the discharge characteristics were measured to provide information on absorption of energy in the discharge plasma and on transfer of arising ions to the substrate at a target power density in a pulse up to 950W∕cm2. Time-averaged mass spectroscopy was performed at the substrate position to characterize ion energy distributions and composition of total ion fluxes onto the substrate. The deposition rate of the copper films formed on a floating substrate at the distance of 100mm from the target was 2.2μm∕min at an average target power density over a pulse period of 96W∕cm2. Very effective ionization of sputtered copper atoms resulted in a strong predominance of copper ions (up to 92%) in total ion fluxes onto the substrate. Trends in measured values of the deposition rate per average target power density and the ionized fraction of sputtered copper atoms in the flux onto the substrate (up to 56%) were explained on the basis of model predictions." @default.
• W2057693531 created "2016-06-24" @default.
• W2057693531 creator A5022745565 @default.
• W2057693531 creator A5025695428 @default.
• W2057693531 creator A5046113612 @default.
• W2057693531 creator A5067797189 @default.
• W2057693531 date "2006-12-29" @default.
• W2057693531 modified "2023-10-14" @default.
• W2057693531 title "High-power pulsed sputtering using a magnetron with enhanced plasma confinement" @default.
• W2057693531 cites W1963495660 @default.
• W2057693531 cites W1964878292 @default.
• W2057693531 cites W2004982340 @default.
• W2057693531 cites W2009655625 @default.
• W2057693531 cites W2010378341 @default.
• W2057693531 cites W2011741695 @default.
• W2057693531 cites W2025801567 @default.
• W2057693531 cites W2029555818 @default.
• W2057693531 cites W2030999196 @default.
• W2057693531 cites W2051397890 @default.
• W2057693531 cites W2051944828 @default.
• W2057693531 cites W2053094013 @default.
• W2057693531 cites W2060688034 @default.
• W2057693531 cites W2065590950 @default.
• W2057693531 cites W2075230502 @default.
• W2057693531 cites W2088938077 @default.
• W2057693531 cites W2094354124 @default.
• W2057693531 cites W2161508873 @default.
• W2057693531 doi "https://doi.org/10.1116/1.2388954" @default.
• W2057693531 hasPublicationYear "2006" @default.
• W2057693531 type Work @default.
• W2057693531 sameAs 2057693531 @default.
• W2057693531 citedByCount "76" @default.
• W2057693531 countsByYear W20576935312012 @default.
• W2057693531 countsByYear W20576935312013 @default.
• W2057693531 countsByYear W20576935312014 @default.
• W2057693531 countsByYear W20576935312015 @default.
• W2057693531 countsByYear W20576935312016 @default.
• W2057693531 countsByYear W20576935312017 @default.
• W2057693531 countsByYear W20576935312018 @default.
• W2057693531 countsByYear W20576935312019 @default.
• W2057693531 countsByYear W20576935312020 @default.
• W2057693531 countsByYear W20576935312021 @default.
• W2057693531 countsByYear W20576935312023 @default.
• W2057693531 crossrefType "journal-article" @default.
• W2057693531 hasAuthorship W2057693531A5022745565 @default.
• W2057693531 hasAuthorship W2057693531A5025695428 @default.
• W2057693531 hasAuthorship W2057693531A5046113612 @default.
• W2057693531 hasAuthorship W2057693531A5067797189 @default.
• W2057693531 hasConcept C111368507 @default.
• W2057693531 hasConcept C113196181 @default.
• W2057693531 hasConcept C121332964 @default.
• W2057693531 hasConcept C123408415 @default.
• W2057693531 hasConcept C127313418 @default.
• W2057693531 hasConcept C145148216 @default.
• W2057693531 hasConcept C163258240 @default.
• W2057693531 hasConcept C165801399 @default.
• W2057693531 hasConcept C171250308 @default.
• W2057693531 hasConcept C178790620 @default.
• W2057693531 hasConcept C184779094 @default.
• W2057693531 hasConcept C185592680 @default.
• W2057693531 hasConcept C19067145 @default.
• W2057693531 hasConcept C191897082 @default.
• W2057693531 hasConcept C192039680 @default.
• W2057693531 hasConcept C192562407 @default.
• W2057693531 hasConcept C198291218 @default.
• W2057693531 hasConcept C199822604 @default.
• W2057693531 hasConcept C21881925 @default.
• W2057693531 hasConcept C22423302 @default.
• W2057693531 hasConcept C2777289219 @default.
• W2057693531 hasConcept C2781083372 @default.
• W2057693531 hasConcept C43617362 @default.
• W2057693531 hasConcept C544778455 @default.
• W2057693531 hasConcept C547737533 @default.
• W2057693531 hasConcept C61427134 @default.
• W2057693531 hasConcept C62520636 @default.
• W2057693531 hasConcept C82706917 @default.
• W2057693531 hasConcept C97892325 @default.
• W2057693531 hasConceptScore W2057693531C111368507 @default.
• W2057693531 hasConceptScore W2057693531C113196181 @default.
• W2057693531 hasConceptScore W2057693531C121332964 @default.
• W2057693531 hasConceptScore W2057693531C123408415 @default.
• W2057693531 hasConceptScore W2057693531C127313418 @default.
• W2057693531 hasConceptScore W2057693531C145148216 @default.
• W2057693531 hasConceptScore W2057693531C163258240 @default.
• W2057693531 hasConceptScore W2057693531C165801399 @default.
• W2057693531 hasConceptScore W2057693531C171250308 @default.
• W2057693531 hasConceptScore W2057693531C178790620 @default.
• W2057693531 hasConceptScore W2057693531C184779094 @default.
• W2057693531 hasConceptScore W2057693531C185592680 @default.
• W2057693531 hasConceptScore W2057693531C19067145 @default.
• W2057693531 hasConceptScore W2057693531C191897082 @default.
• W2057693531 hasConceptScore W2057693531C192039680 @default.
• W2057693531 hasConceptScore W2057693531C192562407 @default.
• W2057693531 hasConceptScore W2057693531C198291218 @default.
• W2057693531 hasConceptScore W2057693531C199822604 @default.
• W2057693531 hasConceptScore W2057693531C21881925 @default.
• W2057693531 hasConceptScore W2057693531C22423302 @default.
• W2057693531 hasConceptScore W2057693531C2777289219 @default.

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