FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057749430> ?p ?o ?g. }

• W2057749430 endingPage "1568" @default.
• W2057749430 startingPage "1563" @default.
• W2057749430 abstract "We investigated the physical and electrical properties of Hf–Zr mixed high-k oxide films obtained by the oxidation and annealing of multi-layered metal films (i.e., Hf/Zr/Hf/Zr/Hf, ∼ 5 nm). We demonstrated that the oxidation of multi-layered metal films results in two distinctive amorphous layers: That is, Hf–Zr mixed oxide film was formed on the top of silicate film due to inter-diffusion between Hf and Zr layer. This film shows the improved dielectric constant (k) and the raised crystallization temperature. Compared with HfO2 and ZrO2 gate dielectric, the crystallization temperature of Hf–Zr mixed oxides was raised by more than 200 °C. Using AES and XPS, we observed that Zr oxide has more fully oxidized stoichiometry than Hf oxide, irrespective of annealing temperatures. We also found that the thickness of an interfacial layer located between Hf–Zr mixed oxide and Si substrate also increases as annealing temperature increases. Especially, the thin SiOx interfacial layer starts to form if annealing temperature increases over 700 °C, deteriorating the equivalent oxide thickness." @default.
• W2057749430 created "2016-06-24" @default.
• W2057749430 creator A5029769355 @default.
• W2057749430 creator A5053107684 @default.
• W2057749430 creator A5073136820 @default.
• W2057749430 creator A5083900860 @default.
• W2057749430 date "2008-02-01" @default.
• W2057749430 modified "2023-09-23" @default.
• W2057749430 title "Characteristics of high-k gate oxide prepared by oxidation of multi-layered Hf/Zr/Hf/Zr/Hf metal films" @default.
• W2057749430 cites W1985641978 @default.
• W2057749430 cites W2001372750 @default.
• W2057749430 cites W2012373184 @default.
• W2057749430 cites W2014079303 @default.
• W2057749430 cites W2024166218 @default.
• W2057749430 cites W2037587145 @default.
• W2057749430 cites W2041663197 @default.
• W2057749430 cites W2045682419 @default.
• W2057749430 cites W2049447147 @default.
• W2057749430 cites W2062268908 @default.
• W2057749430 cites W2068939568 @default.
• W2057749430 cites W2072615671 @default.
• W2057749430 cites W2079499708 @default.
• W2057749430 cites W2079719052 @default.
• W2057749430 cites W2081096093 @default.
• W2057749430 cites W2082154177 @default.
• W2057749430 cites W2094890584 @default.
• W2057749430 doi "https://doi.org/10.1016/j.tsf.2007.03.076" @default.
• W2057749430 hasPublicationYear "2008" @default.
• W2057749430 type Work @default.
• W2057749430 sameAs 2057749430 @default.
• W2057749430 citedByCount "5" @default.
• W2057749430 countsByYear W20577494302012 @default.
• W2057749430 crossrefType "journal-article" @default.
• W2057749430 hasAuthorship W2057749430A5029769355 @default.
• W2057749430 hasAuthorship W2057749430A5053107684 @default.
• W2057749430 hasAuthorship W2057749430A5073136820 @default.
• W2057749430 hasAuthorship W2057749430A5083900860 @default.
• W2057749430 hasConcept C113196181 @default.
• W2057749430 hasConcept C121332964 @default.
• W2057749430 hasConcept C127413603 @default.
• W2057749430 hasConcept C133386390 @default.
• W2057749430 hasConcept C16317505 @default.
• W2057749430 hasConcept C165801399 @default.
• W2057749430 hasConcept C166972891 @default.
• W2057749430 hasConcept C171250308 @default.
• W2057749430 hasConcept C172385210 @default.
• W2057749430 hasConcept C175708663 @default.
• W2057749430 hasConcept C179104552 @default.
• W2057749430 hasConcept C185592680 @default.
• W2057749430 hasConcept C19067145 @default.
• W2057749430 hasConcept C191897082 @default.
• W2057749430 hasConcept C192562407 @default.
• W2057749430 hasConcept C203036418 @default.
• W2057749430 hasConcept C2361726 @default.
• W2057749430 hasConcept C2777855556 @default.
• W2057749430 hasConcept C2779851234 @default.
• W2057749430 hasConcept C42360764 @default.
• W2057749430 hasConcept C43617362 @default.
• W2057749430 hasConcept C49040817 @default.
• W2057749430 hasConcept C52780932 @default.
• W2057749430 hasConcept C544153396 @default.
• W2057749430 hasConcept C56052488 @default.
• W2057749430 hasConcept C62520636 @default.
• W2057749430 hasConcept C8010536 @default.
• W2057749430 hasConceptScore W2057749430C113196181 @default.
• W2057749430 hasConceptScore W2057749430C121332964 @default.
• W2057749430 hasConceptScore W2057749430C127413603 @default.
• W2057749430 hasConceptScore W2057749430C133386390 @default.
• W2057749430 hasConceptScore W2057749430C16317505 @default.
• W2057749430 hasConceptScore W2057749430C165801399 @default.
• W2057749430 hasConceptScore W2057749430C166972891 @default.
• W2057749430 hasConceptScore W2057749430C171250308 @default.
• W2057749430 hasConceptScore W2057749430C172385210 @default.
• W2057749430 hasConceptScore W2057749430C175708663 @default.
• W2057749430 hasConceptScore W2057749430C179104552 @default.
• W2057749430 hasConceptScore W2057749430C185592680 @default.
• W2057749430 hasConceptScore W2057749430C19067145 @default.
• W2057749430 hasConceptScore W2057749430C191897082 @default.
• W2057749430 hasConceptScore W2057749430C192562407 @default.
• W2057749430 hasConceptScore W2057749430C203036418 @default.
• W2057749430 hasConceptScore W2057749430C2361726 @default.
• W2057749430 hasConceptScore W2057749430C2777855556 @default.
• W2057749430 hasConceptScore W2057749430C2779851234 @default.
• W2057749430 hasConceptScore W2057749430C42360764 @default.
• W2057749430 hasConceptScore W2057749430C43617362 @default.
• W2057749430 hasConceptScore W2057749430C49040817 @default.
• W2057749430 hasConceptScore W2057749430C52780932 @default.
• W2057749430 hasConceptScore W2057749430C544153396 @default.
• W2057749430 hasConceptScore W2057749430C56052488 @default.
• W2057749430 hasConceptScore W2057749430C62520636 @default.
• W2057749430 hasConceptScore W2057749430C8010536 @default.
• W2057749430 hasIssue "7" @default.
• W2057749430 hasLocation W20577494301 @default.
• W2057749430 hasOpenAccess W2057749430 @default.
• W2057749430 hasPrimaryLocation W20577494301 @default.
• W2057749430 hasRelatedWork W1560462767 @default.
• W2057749430 hasRelatedWork W1597513149 @default.
• W2057749430 hasRelatedWork W2002143605 @default.

• next