Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057804098> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2057804098 endingPage "4185" @default.
- W2057804098 startingPage "4185" @default.
- W2057804098 abstract "We have developed a novel beamline for SR (synchrotron radiation) lithography using a compact storage ring. The beamline consists of two ellipsoidal focusing mirrors, collecting 34.9 mrad of the horizontal angle of the fan-shaped SR, which delivers X-rays of high intensity onto the wafer. Moreover, an X-ray stepper of Karl Süss, XRS-200, will be attached to the end of the beamline; it offers the exposure field of 25×25 mm 2 in the atmospheric environment. An optical design was realized using a sophisticated method which combines a ray-tracing method with a nonlinear optimization method, the Davidon-Fletcher-Powel (DFP) method. This optimized optical design yielded excellent transmission of photon flux throughout the beamline. We will also discuss the spectral and the spatial uniformity of the illumination, and the quality of the printed image." @default.
- W2057804098 created "2016-06-24" @default.
- W2057804098 creator A5000694065 @default.
- W2057804098 creator A5020641297 @default.
- W2057804098 creator A5041620901 @default.
- W2057804098 date "1992-12-01" @default.
- W2057804098 modified "2023-10-16" @default.
- W2057804098 title "Design Optimization of Synchrotron Radiation Lithography Beamline for a Compact Storage Ring" @default.
- W2057804098 cites W2078511327 @default.
- W2057804098 cites W2161226983 @default.
- W2057804098 doi "https://doi.org/10.1143/jjap.31.4185" @default.
- W2057804098 hasPublicationYear "1992" @default.
- W2057804098 type Work @default.
- W2057804098 sameAs 2057804098 @default.
- W2057804098 citedByCount "7" @default.
- W2057804098 crossrefType "journal-article" @default.
- W2057804098 hasAuthorship W2057804098A5000694065 @default.
- W2057804098 hasAuthorship W2057804098A5020641297 @default.
- W2057804098 hasAuthorship W2057804098A5041620901 @default.
- W2057804098 hasConcept C120665830 @default.
- W2057804098 hasConcept C121332964 @default.
- W2057804098 hasConcept C121483023 @default.
- W2057804098 hasConcept C136959337 @default.
- W2057804098 hasConcept C160671074 @default.
- W2057804098 hasConcept C16332341 @default.
- W2057804098 hasConcept C168834538 @default.
- W2057804098 hasConcept C187504802 @default.
- W2057804098 hasConcept C192562407 @default.
- W2057804098 hasConcept C204223013 @default.
- W2057804098 hasConcept C21368211 @default.
- W2057804098 hasConcept C2776595292 @default.
- W2057804098 hasConcept C2779320509 @default.
- W2057804098 hasConcept C49040817 @default.
- W2057804098 hasConceptScore W2057804098C120665830 @default.
- W2057804098 hasConceptScore W2057804098C121332964 @default.
- W2057804098 hasConceptScore W2057804098C121483023 @default.
- W2057804098 hasConceptScore W2057804098C136959337 @default.
- W2057804098 hasConceptScore W2057804098C160671074 @default.
- W2057804098 hasConceptScore W2057804098C16332341 @default.
- W2057804098 hasConceptScore W2057804098C168834538 @default.
- W2057804098 hasConceptScore W2057804098C187504802 @default.
- W2057804098 hasConceptScore W2057804098C192562407 @default.
- W2057804098 hasConceptScore W2057804098C204223013 @default.
- W2057804098 hasConceptScore W2057804098C21368211 @default.
- W2057804098 hasConceptScore W2057804098C2776595292 @default.
- W2057804098 hasConceptScore W2057804098C2779320509 @default.
- W2057804098 hasConceptScore W2057804098C49040817 @default.
- W2057804098 hasIssue "12S" @default.
- W2057804098 hasLocation W20578040981 @default.
- W2057804098 hasOpenAccess W2057804098 @default.
- W2057804098 hasPrimaryLocation W20578040981 @default.
- W2057804098 hasRelatedWork W1564486987 @default.
- W2057804098 hasRelatedWork W1666085294 @default.
- W2057804098 hasRelatedWork W2039144336 @default.
- W2057804098 hasRelatedWork W2056894152 @default.
- W2057804098 hasRelatedWork W2057804098 @default.
- W2057804098 hasRelatedWork W2064707008 @default.
- W2057804098 hasRelatedWork W2069652212 @default.
- W2057804098 hasRelatedWork W2071910516 @default.
- W2057804098 hasRelatedWork W2078045600 @default.
- W2057804098 hasRelatedWork W2724924822 @default.
- W2057804098 hasVolume "31" @default.
- W2057804098 isParatext "false" @default.
- W2057804098 isRetracted "false" @default.
- W2057804098 magId "2057804098" @default.
- W2057804098 workType "article" @default.