FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2057862886> ?p ?o ?g. }

• W2057862886 endingPage "076508" @default.
• W2057862886 startingPage "076508" @default.
• W2057862886 abstract "The purpose of this study is to provide a novel concept design for complementary metal oxide semiconductor (CMOS) capacitive Z-direction accelerometers. In this design, capacitance-sensing parallel plates and thin single-metal-layer springs are fabricated by chemical plasma etching. This plasma etching process utilizes a rough vacuum to shorten the mean free path of the reactive gases and increase lateral etching and undercut. Moreover, the thin single-metal-layer springs have the characteristic of a lower spring constant to increase the displacement of the proof mass. Thus, the sensitivity can be further improved. This study has established a post-CMOS chemical plasma etching process to release the accelerometer using sensing electrodes of the capacitance-sensing parallel plates. The Z-direction accelerometer has been fabricated by the standard CMOS 0.35 µm two-polycrystalline silicon four-metal (2P4M) process and a post-CMOS process of chemical plasma etching. The measurement results indicate that the sensitivity of the accelerometer is about 0.8 mV/g and the total noise floor is 4.2 µV/√Hz." @default.
• W2057862886 created "2016-06-24" @default.
• W2057862886 creator A5042999475 @default.
• W2057862886 creator A5086345662 @default.
• W2057862886 creator A5087231148 @default.
• W2057862886 date "2009-07-21" @default.
• W2057862886 modified "2023-10-17" @default.
• W2057862886 title "Novel Concept Design for Complementary Metal Oxide Semiconductor Capacitive<i>Z</i>-Direction Accelerometer" @default.
• W2057862886 cites W2000440596 @default.
• W2057862886 cites W2003630946 @default.
• W2057862886 cites W2025975642 @default.
• W2057862886 cites W2047851883 @default.
• W2057862886 cites W2075391089 @default.
• W2057862886 cites W2093328453 @default.
• W2057862886 cites W2104406823 @default.
• W2057862886 cites W2104431065 @default.
• W2057862886 cites W2112726158 @default.
• W2057862886 cites W2152717583 @default.
• W2057862886 doi "https://doi.org/10.1143/jjap.48.076508" @default.
• W2057862886 hasPublicationYear "2009" @default.
• W2057862886 type Work @default.
• W2057862886 sameAs 2057862886 @default.
• W2057862886 citedByCount "2" @default.
• W2057862886 countsByYear W20578628862013 @default.
• W2057862886 countsByYear W20578628862020 @default.
• W2057862886 crossrefType "journal-article" @default.
• W2057862886 hasAuthorship W2057862886A5042999475 @default.
• W2057862886 hasAuthorship W2057862886A5086345662 @default.
• W2057862886 hasAuthorship W2057862886A5087231148 @default.
• W2057862886 hasConcept C100460472 @default.
• W2057862886 hasConcept C107187091 @default.
• W2057862886 hasConcept C111919701 @default.
• W2057862886 hasConcept C119599485 @default.
• W2057862886 hasConcept C127413603 @default.
• W2057862886 hasConcept C130472188 @default.
• W2057862886 hasConcept C147789679 @default.
• W2057862886 hasConcept C154318817 @default.
• W2057862886 hasConcept C159985019 @default.
• W2057862886 hasConcept C171250308 @default.
• W2057862886 hasConcept C17525397 @default.
• W2057862886 hasConcept C185592680 @default.
• W2057862886 hasConcept C192562407 @default.
• W2057862886 hasConcept C206755178 @default.
• W2057862886 hasConcept C2779227376 @default.
• W2057862886 hasConcept C2779292183 @default.
• W2057862886 hasConcept C2780330379 @default.
• W2057862886 hasConcept C2780565262 @default.
• W2057862886 hasConcept C30066665 @default.
• W2057862886 hasConcept C33220542 @default.
• W2057862886 hasConcept C37977207 @default.
• W2057862886 hasConcept C41008148 @default.
• W2057862886 hasConcept C46362747 @default.
• W2057862886 hasConcept C49040817 @default.
• W2057862886 hasConcept C87359718 @default.
• W2057862886 hasConcept C89805583 @default.
• W2057862886 hasConceptScore W2057862886C100460472 @default.
• W2057862886 hasConceptScore W2057862886C107187091 @default.
• W2057862886 hasConceptScore W2057862886C111919701 @default.
• W2057862886 hasConceptScore W2057862886C119599485 @default.
• W2057862886 hasConceptScore W2057862886C127413603 @default.
• W2057862886 hasConceptScore W2057862886C130472188 @default.
• W2057862886 hasConceptScore W2057862886C147789679 @default.
• W2057862886 hasConceptScore W2057862886C154318817 @default.
• W2057862886 hasConceptScore W2057862886C159985019 @default.
• W2057862886 hasConceptScore W2057862886C171250308 @default.
• W2057862886 hasConceptScore W2057862886C17525397 @default.
• W2057862886 hasConceptScore W2057862886C185592680 @default.
• W2057862886 hasConceptScore W2057862886C192562407 @default.
• W2057862886 hasConceptScore W2057862886C206755178 @default.
• W2057862886 hasConceptScore W2057862886C2779227376 @default.
• W2057862886 hasConceptScore W2057862886C2779292183 @default.
• W2057862886 hasConceptScore W2057862886C2780330379 @default.
• W2057862886 hasConceptScore W2057862886C2780565262 @default.
• W2057862886 hasConceptScore W2057862886C30066665 @default.
• W2057862886 hasConceptScore W2057862886C33220542 @default.
• W2057862886 hasConceptScore W2057862886C37977207 @default.
• W2057862886 hasConceptScore W2057862886C41008148 @default.
• W2057862886 hasConceptScore W2057862886C46362747 @default.
• W2057862886 hasConceptScore W2057862886C49040817 @default.
• W2057862886 hasConceptScore W2057862886C87359718 @default.
• W2057862886 hasConceptScore W2057862886C89805583 @default.
• W2057862886 hasIssue "7" @default.
• W2057862886 hasLocation W20578628861 @default.
• W2057862886 hasOpenAccess W2057862886 @default.
• W2057862886 hasPrimaryLocation W20578628861 @default.
• W2057862886 hasRelatedWork W2004494669 @default.
• W2057862886 hasRelatedWork W2035159056 @default.
• W2057862886 hasRelatedWork W2116733252 @default.
• W2057862886 hasRelatedWork W2137186719 @default.
• W2057862886 hasRelatedWork W2376678868 @default.
• W2057862886 hasRelatedWork W2466887265 @default.
• W2057862886 hasRelatedWork W2539202396 @default.
• W2057862886 hasRelatedWork W2748603911 @default.
• W2057862886 hasRelatedWork W4225726868 @default.
• W2057862886 hasRelatedWork W836216862 @default.
• W2057862886 hasVolume "48" @default.
• W2057862886 isParatext "false" @default.
• W2057862886 isRetracted "false" @default.

• next