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- W2057876793 abstract "Two-dimensional numerical simulations of self-consistent rf glow discharges in ${mathrm{N}}_{2}$ and ${mathrm{SF}}_{6}$ gases are presented in this paper. Based on the single-moment fluid model, more accurate flux-corrected transport and reconstructed fast-Fourier-transform techniques are used to solve the continuity and Poisson's equations, respectively. The evolution of electric fields, ion densities, and electron densities has been displayed by the spatiotemporal contours in a cylindrically symmetric geometry. The influence of gas properties (nonattaching versus strong attaching gas) and background pressures (1 and 2 Torr) are investigated. The sheath near the radial wall of the reactor has been shown its important role in the rf discharges, particularly in the strong attaching gas or at a higher background pressure." @default.
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- W2057876793 title "Two-dimensional simulations of rf glow discharges in<mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant=normal>N</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>and<mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant=normal>SF</mml:mi></mml:mrow><mml:mrow><mml:mn>6</mml:mn></mml:mrow></mml:msub></mml:mrow></…" @default.
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- W2057876793 doi "https://doi.org/10.1103/physreva.41.5626" @default.
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