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- W2057960079 abstract "Characteristics of thin-film NTC infrared sensors fabricated by micromaching technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/SiOx/(100)Si. NTC film of Mn1.5CoNi0.5O3 with 0.5 micrometers in thickness was deposited on SiOx layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 600-800 degree(s)C in air for 1h. Au (400nm)/Ti (100nm) electrode was coated on NTC film by dc sputtering. By the results of microstructural, X-ray and NTC analysis, post-annealed NTC films at 700 degree(s)C for 1h showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65mm. Sensors with thin sensing membrane show the good detecting characteristics.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2057960079 date "2001-06-12" @default.
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- W2057960079 title "<title>Detectivity of thin film NTC infrared sensors</title>" @default.
- W2057960079 doi "https://doi.org/10.1117/12.429431" @default.
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