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- W2057972411 abstract "With growing developments in biomedical research and micro industrial applications, there is a demand for micro-grippers that are reliable and can operate with high precision. This paper presents a MEMS micro-gripper with an integrated electrothermal force sensors. The microgripper is actuated by electrostatic comb-drives. Electrothermal resistive sensors are used to measure the gripping force. In this arrangement, the sensing arms deflection induces a temperature difference between two identical resistive sensors, biased at the same voltage, which results in current variation in the resistors. The currents are then converted to an output voltage using a half Wheat-stone bridge and an instrumentation amplifier. With the sensing displacement information available, the gripping force can be calculated. The device was designed and fabricated in a commercial Silicon-On Insulator MEMS foundry (MEMSCAP). A pick-and-place operation on 85 μm micro-beads on 3-axis micro-positioner is performed to evaluate the performance of the device. The experiment shows that the micro-gripper is able to handle a wide range of micro-sample sizes with biocompatibility and gentle handling forces." @default.
- W2057972411 created "2016-06-24" @default.
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- W2057972411 date "2013-07-01" @default.
- W2057972411 modified "2023-09-23" @default.
- W2057972411 title "Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor" @default.
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- W2057972411 doi "https://doi.org/10.1109/aim.2013.6584116" @default.
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