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• W2058014912 abstract "Dissociative adsorption of PH3 on Si(111)-(7 × 7) has been observed at 80 K. The Si-H species is observed to be produced upon PH3 adsorption. Depending upon the PH3 surface coverage, PH3(a) (minority species) and PH2(a) species are found on the surface. The thermal dissociation of the surface PH2 species occurs between 450 and 500 K, resulting in the capture of hydrogen and phosphorus on the surface." @default.
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• W2058014912 date "1991-03-01" @default.
• W2058014912 modified "2023-10-07" @default.
• W2058014912 title "Dissociative adsorption of PH3 on Si(111)-(7 × 7): a high resolution electron energy loss spectroscopy study" @default.
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• W2058014912 doi "https://doi.org/10.1016/0039-6028(91)90491-a" @default.
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