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• W2058075900 abstract "We present a simple and efficient way to obtain freestanding graphene membranes. On these membranes, we demonstrate that electron-beam induced deposition of carbon can be used to obtain arbitrary patterns with a nanometer-scale resolution. In the case of a periodic grating, we obtain a half-pitch of 2.5nm. Electron-beam induced deposition on graphene might be used to create nanometer-scale doping patterns, diffraction gratings, or etch masks in this novel electronic material." @default.
• W2058075900 created "2016-06-24" @default.
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• W2058075900 date "2008-03-24" @default.
• W2058075900 modified "2023-10-18" @default.
• W2058075900 title "Hydrocarbon lithography on graphene membranes" @default.
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• W2058075900 doi "https://doi.org/10.1063/1.2901147" @default.
• W2058075900 hasPublicationYear "2008" @default.
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