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- W2058191736 endingPage "2568" @default.
- W2058191736 startingPage "2563" @default.
- W2058191736 abstract "Shape locate mark registration, a novel image processing technique to accurately locate even damaged registration marks, has been used to resolve alignment challenges in aggressively scaled lithography levels for sub-32 nm complementary metal oxide semiconductor devices. The achievable overlay using traditional registration hardware and software is ultimately limited by the quality of the registration marks and any changes in the registration mark signals caused by device process steps between overlay critical exposure levels. This article discusses the details in the shape locate mark registration and results achieved for the device program. The shape locate mark registration system has been implemented and tested on a Vistec VB6 electron beam lithography tool. Mark locate repeatabilities of better than 5 nm (3σ) across 200 mm wafers and better than 10 nm overlay for device lithography have been demonstrated. Highly scaled 22 nm node fin field effect transistor (FinFET) static random access memory cells of area down to 0.099 μm2 were fabricated using all e-beam lithography and shape locate registration to demonstrate the scalability of FinFET technology (Kawasaki et al., Tech. Dig. – Int. Electron. Devices Meet, 2008, p. 237)." @default.
- W2058191736 created "2016-06-24" @default.
- W2058191736 creator A5001590973 @default.
- W2058191736 creator A5009473240 @default.
- W2058191736 creator A5013146182 @default.
- W2058191736 creator A5027882410 @default.
- W2058191736 creator A5059647234 @default.
- W2058191736 creator A5081151519 @default.
- W2058191736 date "2009-11-01" @default.
- W2058191736 modified "2023-09-27" @default.
- W2058191736 title "Image processing using shape recognition for alignment to damaged registration marks in electron beam lithography" @default.
- W2058191736 cites W2019576522 @default.
- W2058191736 cites W2043182472 @default.
- W2058191736 cites W2066934329 @default.
- W2058191736 cites W2073697701 @default.
- W2058191736 cites W4253575250 @default.
- W2058191736 doi "https://doi.org/10.1116/1.3237099" @default.
- W2058191736 hasPublicationYear "2009" @default.
- W2058191736 type Work @default.
- W2058191736 sameAs 2058191736 @default.
- W2058191736 citedByCount "9" @default.
- W2058191736 countsByYear W20581917362014 @default.
- W2058191736 crossrefType "journal-article" @default.
- W2058191736 hasAuthorship W2058191736A5001590973 @default.
- W2058191736 hasAuthorship W2058191736A5009473240 @default.
- W2058191736 hasAuthorship W2058191736A5013146182 @default.
- W2058191736 hasAuthorship W2058191736A5027882410 @default.
- W2058191736 hasAuthorship W2058191736A5059647234 @default.
- W2058191736 hasAuthorship W2058191736A5081151519 @default.
- W2058191736 hasConcept C115961682 @default.
- W2058191736 hasConcept C120665830 @default.
- W2058191736 hasConcept C121332964 @default.
- W2058191736 hasConcept C136085584 @default.
- W2058191736 hasConcept C154945302 @default.
- W2058191736 hasConcept C160671074 @default.
- W2058191736 hasConcept C163581340 @default.
- W2058191736 hasConcept C166704113 @default.
- W2058191736 hasConcept C171250308 @default.
- W2058191736 hasConcept C177409738 @default.
- W2058191736 hasConcept C192562407 @default.
- W2058191736 hasConcept C199360897 @default.
- W2058191736 hasConcept C200274948 @default.
- W2058191736 hasConcept C204223013 @default.
- W2058191736 hasConcept C2777904410 @default.
- W2058191736 hasConcept C2779227376 @default.
- W2058191736 hasConcept C31972630 @default.
- W2058191736 hasConcept C41008148 @default.
- W2058191736 hasConcept C41794268 @default.
- W2058191736 hasConcept C48044578 @default.
- W2058191736 hasConcept C49040817 @default.
- W2058191736 hasConcept C53524968 @default.
- W2058191736 hasConcept C70520399 @default.
- W2058191736 hasConcept C77088390 @default.
- W2058191736 hasConcept C9390403 @default.
- W2058191736 hasConceptScore W2058191736C115961682 @default.
- W2058191736 hasConceptScore W2058191736C120665830 @default.
- W2058191736 hasConceptScore W2058191736C121332964 @default.
- W2058191736 hasConceptScore W2058191736C136085584 @default.
- W2058191736 hasConceptScore W2058191736C154945302 @default.
- W2058191736 hasConceptScore W2058191736C160671074 @default.
- W2058191736 hasConceptScore W2058191736C163581340 @default.
- W2058191736 hasConceptScore W2058191736C166704113 @default.
- W2058191736 hasConceptScore W2058191736C171250308 @default.
- W2058191736 hasConceptScore W2058191736C177409738 @default.
- W2058191736 hasConceptScore W2058191736C192562407 @default.
- W2058191736 hasConceptScore W2058191736C199360897 @default.
- W2058191736 hasConceptScore W2058191736C200274948 @default.
- W2058191736 hasConceptScore W2058191736C204223013 @default.
- W2058191736 hasConceptScore W2058191736C2777904410 @default.
- W2058191736 hasConceptScore W2058191736C2779227376 @default.
- W2058191736 hasConceptScore W2058191736C31972630 @default.
- W2058191736 hasConceptScore W2058191736C41008148 @default.
- W2058191736 hasConceptScore W2058191736C41794268 @default.
- W2058191736 hasConceptScore W2058191736C48044578 @default.
- W2058191736 hasConceptScore W2058191736C49040817 @default.
- W2058191736 hasConceptScore W2058191736C53524968 @default.
- W2058191736 hasConceptScore W2058191736C70520399 @default.
- W2058191736 hasConceptScore W2058191736C77088390 @default.
- W2058191736 hasConceptScore W2058191736C9390403 @default.
- W2058191736 hasIssue "6" @default.
- W2058191736 hasLocation W20581917361 @default.
- W2058191736 hasOpenAccess W2058191736 @default.
- W2058191736 hasPrimaryLocation W20581917361 @default.
- W2058191736 hasRelatedWork W1946880670 @default.
- W2058191736 hasRelatedWork W1980495369 @default.
- W2058191736 hasRelatedWork W2007880660 @default.
- W2058191736 hasRelatedWork W2022121633 @default.
- W2058191736 hasRelatedWork W2035821057 @default.
- W2058191736 hasRelatedWork W2145411830 @default.
- W2058191736 hasRelatedWork W2325400957 @default.
- W2058191736 hasRelatedWork W377256889 @default.
- W2058191736 hasRelatedWork W4253163137 @default.
- W2058191736 hasRelatedWork W2526528264 @default.
- W2058191736 hasVolume "27" @default.
- W2058191736 isParatext "false" @default.
- W2058191736 isRetracted "false" @default.
- W2058191736 magId "2058191736" @default.
- W2058191736 workType "article" @default.