Matches in SemOpenAlex for { <https://semopenalex.org/work/W2058225854> ?p ?o ?g. }
Showing items 1 to 58 of
58
with 100 items per page.
- W2058225854 endingPage "1258" @default.
- W2058225854 startingPage "1254" @default.
- W2058225854 abstract "The temperature-dependent breakdown of silicon oxynitride gate dielectrics was studied to determine their reliability at and above operating temperatures. This paper demonstrates that the Weibull slopes of the ultra-thin layers are temperature dependent in the range from room temperature to 200 °C, and furthermore different behaviour is observed for pmos and nmos structures, with pmos structures not suffering any reliability loss at elevated temperature. We highlight that the improved reliability may simply be related to the problem of detecting the 'real' breakdown in the layers. Further to this we find an interesting effect where temperature and voltage can be used interchangeably to stress an oxide, and propose a method of normalizing stress data collected at a number of stress temperatures to one reference temperature. The findings support a voltage-dependent voltage acceleration." @default.
- W2058225854 created "2016-06-24" @default.
- W2058225854 creator A5036819179 @default.
- W2058225854 creator A5038878125 @default.
- W2058225854 creator A5058263075 @default.
- W2058225854 creator A5061087611 @default.
- W2058225854 date "2004-09-16" @default.
- W2058225854 modified "2023-10-02" @default.
- W2058225854 title "Temperature-accelerated breakdown in ultra-thin SiON dielectrics" @default.
- W2058225854 cites W1984930651 @default.
- W2058225854 cites W2013505240 @default.
- W2058225854 cites W2029437716 @default.
- W2058225854 cites W2041495926 @default.
- W2058225854 cites W2042217955 @default.
- W2058225854 cites W2080432206 @default.
- W2058225854 cites W2113488650 @default.
- W2058225854 cites W2535569897 @default.
- W2058225854 doi "https://doi.org/10.1088/0268-1242/19/11/007" @default.
- W2058225854 hasPublicationYear "2004" @default.
- W2058225854 type Work @default.
- W2058225854 sameAs 2058225854 @default.
- W2058225854 citedByCount "2" @default.
- W2058225854 crossrefType "journal-article" @default.
- W2058225854 hasAuthorship W2058225854A5036819179 @default.
- W2058225854 hasAuthorship W2058225854A5038878125 @default.
- W2058225854 hasAuthorship W2058225854A5058263075 @default.
- W2058225854 hasAuthorship W2058225854A5061087611 @default.
- W2058225854 hasConcept C133386390 @default.
- W2058225854 hasConcept C185592680 @default.
- W2058225854 hasConcept C192562407 @default.
- W2058225854 hasConcept C49040817 @default.
- W2058225854 hasConcept C70401718 @default.
- W2058225854 hasConceptScore W2058225854C133386390 @default.
- W2058225854 hasConceptScore W2058225854C185592680 @default.
- W2058225854 hasConceptScore W2058225854C192562407 @default.
- W2058225854 hasConceptScore W2058225854C49040817 @default.
- W2058225854 hasConceptScore W2058225854C70401718 @default.
- W2058225854 hasIssue "11" @default.
- W2058225854 hasLocation W20582258541 @default.
- W2058225854 hasOpenAccess W2058225854 @default.
- W2058225854 hasPrimaryLocation W20582258541 @default.
- W2058225854 hasRelatedWork W2085068016 @default.
- W2058225854 hasRelatedWork W2092872563 @default.
- W2058225854 hasRelatedWork W2371009596 @default.
- W2058225854 hasRelatedWork W2374646600 @default.
- W2058225854 hasRelatedWork W2804544673 @default.
- W2058225854 hasRelatedWork W2863738027 @default.
- W2058225854 hasRelatedWork W2899084033 @default.
- W2058225854 hasRelatedWork W4253731651 @default.
- W2058225854 hasRelatedWork W4292714664 @default.
- W2058225854 hasRelatedWork W2023484602 @default.
- W2058225854 hasVolume "19" @default.
- W2058225854 isParatext "false" @default.
- W2058225854 isRetracted "false" @default.
- W2058225854 magId "2058225854" @default.
- W2058225854 workType "article" @default.