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- W2058230654 abstract "Short wavelength radiation, in the 1-20 nm wavelength range is discussed, with particular emphasis on applications to soft x-ray (SXR) microscopy and extreme ultraviolet (EUV) radiation. In this paper we bring attention to the fact that these two applications require a wide variety of SXR/EUV sources, some with good spatial coherence, others largely incoherent; some at fairly high average power (tens of watts), others at rather low (microwatts) power; some at fixed wavelength, others tunable. These provide great opportunities for attendees of this workshop who represent the world's body of knowledge in this area. We give reference to recent papers to illustrate these points, and call attention to recurring publications where further opportunities and progress can be monitored." @default.
- W2058230654 created "2016-06-24" @default.
- W2058230654 creator A5053477612 @default.
- W2058230654 date "2001-07-01" @default.
- W2058230654 modified "2023-09-27" @default.
- W2058230654 title "Applications of short wavelength radiation : Soft X-ray microscopy and EUV lithography" @default.
- W2058230654 doi "https://doi.org/10.1051/jp4:2001286" @default.
- W2058230654 hasPublicationYear "2001" @default.
- W2058230654 type Work @default.
- W2058230654 sameAs 2058230654 @default.
- W2058230654 citedByCount "2" @default.
- W2058230654 crossrefType "journal-article" @default.
- W2058230654 hasAuthorship W2058230654A5053477612 @default.
- W2058230654 hasConcept C120665830 @default.
- W2058230654 hasConcept C121332964 @default.
- W2058230654 hasConcept C146024833 @default.
- W2058230654 hasConcept C153385146 @default.
- W2058230654 hasConcept C162996421 @default.
- W2058230654 hasConcept C177322064 @default.
- W2058230654 hasConcept C185592680 @default.
- W2058230654 hasConcept C192562407 @default.
- W2058230654 hasConcept C204223013 @default.
- W2058230654 hasConcept C2781181686 @default.
- W2058230654 hasConcept C2987742019 @default.
- W2058230654 hasConcept C49040817 @default.
- W2058230654 hasConcept C520434653 @default.
- W2058230654 hasConcept C62520636 @default.
- W2058230654 hasConcept C6260449 @default.
- W2058230654 hasConceptScore W2058230654C120665830 @default.
- W2058230654 hasConceptScore W2058230654C121332964 @default.
- W2058230654 hasConceptScore W2058230654C146024833 @default.
- W2058230654 hasConceptScore W2058230654C153385146 @default.
- W2058230654 hasConceptScore W2058230654C162996421 @default.
- W2058230654 hasConceptScore W2058230654C177322064 @default.
- W2058230654 hasConceptScore W2058230654C185592680 @default.
- W2058230654 hasConceptScore W2058230654C192562407 @default.
- W2058230654 hasConceptScore W2058230654C204223013 @default.
- W2058230654 hasConceptScore W2058230654C2781181686 @default.
- W2058230654 hasConceptScore W2058230654C2987742019 @default.
- W2058230654 hasConceptScore W2058230654C49040817 @default.
- W2058230654 hasConceptScore W2058230654C520434653 @default.
- W2058230654 hasConceptScore W2058230654C62520636 @default.
- W2058230654 hasConceptScore W2058230654C6260449 @default.
- W2058230654 hasLocation W20582306541 @default.
- W2058230654 hasOpenAccess W2058230654 @default.
- W2058230654 hasPrimaryLocation W20582306541 @default.
- W2058230654 hasRelatedWork W1976278812 @default.
- W2058230654 hasRelatedWork W1979162298 @default.
- W2058230654 hasRelatedWork W1983808508 @default.
- W2058230654 hasRelatedWork W2047614084 @default.
- W2058230654 hasRelatedWork W2051701548 @default.
- W2058230654 hasRelatedWork W2055870392 @default.
- W2058230654 hasRelatedWork W2075365289 @default.
- W2058230654 hasRelatedWork W2079459063 @default.
- W2058230654 hasRelatedWork W2119915144 @default.
- W2058230654 hasRelatedWork W2120021986 @default.
- W2058230654 hasRelatedWork W2281905945 @default.
- W2058230654 hasRelatedWork W2300998316 @default.
- W2058230654 hasRelatedWork W2463941802 @default.
- W2058230654 hasRelatedWork W2487591134 @default.
- W2058230654 hasRelatedWork W2765562997 @default.
- W2058230654 hasRelatedWork W2890460156 @default.
- W2058230654 hasRelatedWork W2897845244 @default.
- W2058230654 hasRelatedWork W3121274459 @default.
- W2058230654 hasRelatedWork W3130048726 @default.
- W2058230654 hasRelatedWork W2017193490 @default.
- W2058230654 isParatext "false" @default.
- W2058230654 isRetracted "false" @default.
- W2058230654 magId "2058230654" @default.
- W2058230654 workType "article" @default.