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- W2058234621 endingPage "456" @default.
- W2058234621 startingPage "452" @default.
- W2058234621 abstract "A system has been developed which permits the measurement of dielectric film thicknesses in-situ during development or etching processes. This can be extended to growth or deposition processes. Two examples of its uses are presented: the determination of the thickness of phosphosilicate glass layers on silicon dioxide coated silicon wafers by making use of the etch rate differences, and the monitoring of photoresist thickness during development to characterize the photoresist development process." @default.
- W2058234621 created "2016-06-24" @default.
- W2058234621 creator A5012487627 @default.
- W2058234621 creator A5078253699 @default.
- W2058234621 date "1975-07-01" @default.
- W2058234621 modified "2023-10-17" @default.
- W2058234621 title "In-situ measurement of dielectric thickness during etching or developing processes" @default.
- W2058234621 cites W1965180226 @default.
- W2058234621 doi "https://doi.org/10.1109/t-ed.1975.18160" @default.
- W2058234621 hasPublicationYear "1975" @default.
- W2058234621 type Work @default.
- W2058234621 sameAs 2058234621 @default.
- W2058234621 citedByCount "51" @default.
- W2058234621 countsByYear W20582346212012 @default.
- W2058234621 countsByYear W20582346212013 @default.
- W2058234621 countsByYear W20582346212014 @default.
- W2058234621 countsByYear W20582346212015 @default.
- W2058234621 countsByYear W20582346212016 @default.
- W2058234621 countsByYear W20582346212021 @default.
- W2058234621 countsByYear W20582346212022 @default.
- W2058234621 crossrefType "journal-article" @default.
- W2058234621 hasAuthorship W2058234621A5012487627 @default.
- W2058234621 hasAuthorship W2058234621A5078253699 @default.
- W2058234621 hasConcept C100460472 @default.
- W2058234621 hasConcept C1291036 @default.
- W2058234621 hasConcept C133386390 @default.
- W2058234621 hasConcept C134406635 @default.
- W2058234621 hasConcept C151730666 @default.
- W2058234621 hasConcept C159985019 @default.
- W2058234621 hasConcept C160671074 @default.
- W2058234621 hasConcept C178790620 @default.
- W2058234621 hasConcept C185592680 @default.
- W2058234621 hasConcept C192562407 @default.
- W2058234621 hasConcept C2777822432 @default.
- W2058234621 hasConcept C2779089622 @default.
- W2058234621 hasConcept C2779227376 @default.
- W2058234621 hasConcept C2816523 @default.
- W2058234621 hasConcept C49040817 @default.
- W2058234621 hasConcept C544956773 @default.
- W2058234621 hasConcept C64297162 @default.
- W2058234621 hasConcept C86803240 @default.
- W2058234621 hasConceptScore W2058234621C100460472 @default.
- W2058234621 hasConceptScore W2058234621C1291036 @default.
- W2058234621 hasConceptScore W2058234621C133386390 @default.
- W2058234621 hasConceptScore W2058234621C134406635 @default.
- W2058234621 hasConceptScore W2058234621C151730666 @default.
- W2058234621 hasConceptScore W2058234621C159985019 @default.
- W2058234621 hasConceptScore W2058234621C160671074 @default.
- W2058234621 hasConceptScore W2058234621C178790620 @default.
- W2058234621 hasConceptScore W2058234621C185592680 @default.
- W2058234621 hasConceptScore W2058234621C192562407 @default.
- W2058234621 hasConceptScore W2058234621C2777822432 @default.
- W2058234621 hasConceptScore W2058234621C2779089622 @default.
- W2058234621 hasConceptScore W2058234621C2779227376 @default.
- W2058234621 hasConceptScore W2058234621C2816523 @default.
- W2058234621 hasConceptScore W2058234621C49040817 @default.
- W2058234621 hasConceptScore W2058234621C544956773 @default.
- W2058234621 hasConceptScore W2058234621C64297162 @default.
- W2058234621 hasConceptScore W2058234621C86803240 @default.
- W2058234621 hasIssue "7" @default.
- W2058234621 hasLocation W20582346211 @default.
- W2058234621 hasOpenAccess W2058234621 @default.
- W2058234621 hasPrimaryLocation W20582346211 @default.
- W2058234621 hasRelatedWork W2058234621 @default.
- W2058234621 hasRelatedWork W2058712705 @default.
- W2058234621 hasRelatedWork W2117305598 @default.
- W2058234621 hasRelatedWork W2120981864 @default.
- W2058234621 hasRelatedWork W2164883942 @default.
- W2058234621 hasRelatedWork W2238580949 @default.
- W2058234621 hasRelatedWork W2360631777 @default.
- W2058234621 hasRelatedWork W3177375295 @default.
- W2058234621 hasRelatedWork W4239056382 @default.
- W2058234621 hasRelatedWork W2181622368 @default.
- W2058234621 hasVolume "22" @default.
- W2058234621 isParatext "false" @default.
- W2058234621 isRetracted "false" @default.
- W2058234621 magId "2058234621" @default.
- W2058234621 workType "article" @default.